Microprocessing of arched bridge structures with epoxy resin by proton beam writing

Katsuyoshi Takano, Atsushi Asano, Yuta Maeyoshi, Hiromi Marui, Masaaki Omichi, Akinori Saeki, Shu Seki, Takahiro Satoh, Yasuyuki Ishii, Tomihiro Kamiya, Masashi Koka, Takeru Ohkubo, Masaki Sugimoto, Hiroyuki Nishikawa

Research output: Contribution to journalArticle

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)43-46
Number of pages4
JournalJournal of Photopolymer Science and Technology
Volume25
Issue number1
DOIs
Publication statusPublished - 2012

Fingerprint

Proton beams
Photolithography
Epoxy resins

Keywords

  • Photolithography
  • Proton beam writing
  • SU-8 photoresist
  • Supercritical drying
  • Three dimensional structure

ASJC Scopus subject areas

  • Materials Chemistry
  • Polymers and Plastics
  • Organic Chemistry

Cite this

Microprocessing of arched bridge structures with epoxy resin by proton beam writing. / Takano, Katsuyoshi; Asano, Atsushi; Maeyoshi, Yuta; Marui, Hiromi; Omichi, Masaaki; Saeki, Akinori; Seki, Shu; Satoh, Takahiro; Ishii, Yasuyuki; Kamiya, Tomihiro; Koka, Masashi; Ohkubo, Takeru; Sugimoto, Masaki; Nishikawa, Hiroyuki.

In: Journal of Photopolymer Science and Technology, Vol. 25, No. 1, 2012, p. 43-46.

Research output: Contribution to journalArticle

Takano, K, Asano, A, Maeyoshi, Y, Marui, H, Omichi, M, Saeki, A, Seki, S, Satoh, T, Ishii, Y, Kamiya, T, Koka, M, Ohkubo, T, Sugimoto, M & Nishikawa, H 2012, 'Microprocessing of arched bridge structures with epoxy resin by proton beam writing', Journal of Photopolymer Science and Technology, vol. 25, no. 1, pp. 43-46. https://doi.org/10.2494/photopolymer.25.43
Takano, Katsuyoshi ; Asano, Atsushi ; Maeyoshi, Yuta ; Marui, Hiromi ; Omichi, Masaaki ; Saeki, Akinori ; Seki, Shu ; Satoh, Takahiro ; Ishii, Yasuyuki ; Kamiya, Tomihiro ; Koka, Masashi ; Ohkubo, Takeru ; Sugimoto, Masaki ; Nishikawa, Hiroyuki. / Microprocessing of arched bridge structures with epoxy resin by proton beam writing. In: Journal of Photopolymer Science and Technology. 2012 ; Vol. 25, No. 1. pp. 43-46.
@article{c76e4df8d56a40be99e61db42e61fcdd,
title = "Microprocessing of arched bridge structures with epoxy resin by proton beam writing",
keywords = "Photolithography, Proton beam writing, SU-8 photoresist, Supercritical drying, Three dimensional structure",
author = "Katsuyoshi Takano and Atsushi Asano and Yuta Maeyoshi and Hiromi Marui and Masaaki Omichi and Akinori Saeki and Shu Seki and Takahiro Satoh and Yasuyuki Ishii and Tomihiro Kamiya and Masashi Koka and Takeru Ohkubo and Masaki Sugimoto and Hiroyuki Nishikawa",
year = "2012",
doi = "10.2494/photopolymer.25.43",
language = "English",
volume = "25",
pages = "43--46",
journal = "Journal of Photopolymer Science and Technology",
issn = "0914-9244",
publisher = "Tokai University",
number = "1",

}

TY - JOUR

T1 - Microprocessing of arched bridge structures with epoxy resin by proton beam writing

AU - Takano, Katsuyoshi

AU - Asano, Atsushi

AU - Maeyoshi, Yuta

AU - Marui, Hiromi

AU - Omichi, Masaaki

AU - Saeki, Akinori

AU - Seki, Shu

AU - Satoh, Takahiro

AU - Ishii, Yasuyuki

AU - Kamiya, Tomihiro

AU - Koka, Masashi

AU - Ohkubo, Takeru

AU - Sugimoto, Masaki

AU - Nishikawa, Hiroyuki

PY - 2012

Y1 - 2012

KW - Photolithography

KW - Proton beam writing

KW - SU-8 photoresist

KW - Supercritical drying

KW - Three dimensional structure

UR - http://www.scopus.com/inward/record.url?scp=84864465968&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84864465968&partnerID=8YFLogxK

U2 - 10.2494/photopolymer.25.43

DO - 10.2494/photopolymer.25.43

M3 - Article

VL - 25

SP - 43

EP - 46

JO - Journal of Photopolymer Science and Technology

JF - Journal of Photopolymer Science and Technology

SN - 0914-9244

IS - 1

ER -