Microprocessing of arched bridge structures with epoxy resin by proton beam writing

Katsuyoshi Takano, Atsushi Asano, Yuta Maeyoshi, Hiromi Marui, Masaaki Omichi, Akinori Saeki, Shu Seki, Takahiro Satoh, Yasuyuki Ishii, Tomihiro Kamiya, Masashi Koka, Takeru Ohkubo, Masaki Sugimoto, Hiroyuki Nishikawa

Research output: Contribution to journal › Article

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)43-46
Number of pages4
JournalJournal of Photopolymer Science and Technology
Volume25
Issue number1
DOIs
Publication statusPublished - 2012

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Proton beams
Photolithography
Epoxy resins

Keywords

  • Photolithography
  • Proton beam writing
  • SU-8 photoresist
  • Supercritical drying
  • Three dimensional structure

ASJC Scopus subject areas

  • Materials Chemistry
  • Polymers and Plastics
  • Organic Chemistry

Cite this

Microprocessing of arched bridge structures with epoxy resin by proton beam writing. / Takano, Katsuyoshi; Asano, Atsushi; Maeyoshi, Yuta; Marui, Hiromi; Omichi, Masaaki; Saeki, Akinori; Seki, Shu; Satoh, Takahiro; Ishii, Yasuyuki; Kamiya, Tomihiro; Koka, Masashi; Ohkubo, Takeru; Sugimoto, Masaki; Nishikawa, Hiroyuki.

In: Journal of Photopolymer Science and Technology, Vol. 25, No. 1, 2012, p. 43-46.

Research output: Contribution to journal › Article

Takano, K, Asano, A, Maeyoshi, Y, Marui, H, Omichi, M, Saeki, A, Seki, S, Satoh, T, Ishii, Y, Kamiya, T, Koka, M, Ohkubo, T, Sugimoto, M & Nishikawa, H 2012, 'Microprocessing of arched bridge structures with epoxy resin by proton beam writing', Journal of Photopolymer Science and Technology, vol. 25, no. 1, pp. 43-46. https://doi.org/10.2494/photopolymer.25.43
Takano K, Asano A, Maeyoshi Y, Marui H, Omichi M, Saeki A et al. Microprocessing of arched bridge structures with epoxy resin by proton beam writing. Journal of Photopolymer Science and Technology. 2012;25(1):43-46. https://doi.org/10.2494/photopolymer.25.43
Takano, Katsuyoshi ; Asano, Atsushi ; Maeyoshi, Yuta ; Marui, Hiromi ; Omichi, Masaaki ; Saeki, Akinori ; Seki, Shu ; Satoh, Takahiro ; Ishii, Yasuyuki ; Kamiya, Tomihiro ; Koka, Masashi ; Ohkubo, Takeru ; Sugimoto, Masaki ; Nishikawa, Hiroyuki. / Microprocessing of arched bridge structures with epoxy resin by proton beam writing. In: Journal of Photopolymer Science and Technology. 2012 ; Vol. 25, No. 1. pp. 43-46.
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author = "Katsuyoshi Takano and Atsushi Asano and Yuta Maeyoshi and Hiromi Marui and Masaaki Omichi and Akinori Saeki and Shu Seki and Takahiro Satoh and Yasuyuki Ishii and Tomihiro Kamiya and Masashi Koka and Takeru Ohkubo and Masaki Sugimoto and Hiroyuki Nishikawa",
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AU - Saeki, Akinori

AU - Seki, Shu

AU - Satoh, Takahiro

AU - Ishii, Yasuyuki

AU - Kamiya, Tomihiro

AU - Koka, Masashi

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AU - Sugimoto, Masaki

AU - Nishikawa, Hiroyuki

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