Microprocessing of arched bridge structures with epoxy resin by proton beam writing

Katsuyoshi Takano, Atsushi Asano, Yuta Maeyoshi, Hiromi Marui, Masaaki Omichi, Akinori Saeki, Shu Seki, Takahiro Satoh, Yasuyuki Ishii, Tomihiro Kamiya, Masashi Koka, Takeru Ohkubo, Masaki Sugimoto, Hiroyuki Nishikawa

Research output: Contribution to journalArticle

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)43-46
Number of pages4
JournalJournal of Photopolymer Science and Technology
Volume25
Issue number1
DOIs
Publication statusPublished - 2012

Keywords

  • Photolithography
  • Proton beam writing
  • SU-8 photoresist
  • Supercritical drying
  • Three dimensional structure

ASJC Scopus subject areas

  • Materials Chemistry
  • Polymers and Plastics
  • Organic Chemistry

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