Microprocessing of arched bridge structures with epoxy resin by proton beam writing

Katsuyoshi Takano; Atsushi Asano; Yuta Maeyoshi; Hiromi Marui; Masaaki Omichi; Akinori Saeki; Shu Seki; Takahiro Satoh; Yasuyuki Ishii; Tomihiro Kamiya; Masashi Koka; Takeru Ohkubo; Masaki Sugimoto; Hiroyuki Nishikawa

doi:10.2494/photopolymer.25.43

Microprocessing of arched bridge structures with epoxy resin by proton beam writing

Katsuyoshi Takano, Atsushi Asano, Yuta Maeyoshi, Hiromi Marui, Masaaki Omichi, Akinori Saeki, Shu Seki, Takahiro Satoh, Yasuyuki Ishii, Tomihiro Kamiya, Masashi Koka, Takeru Ohkubo, Masaki Sugimoto, Hiroyuki Nishikawa

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Original language	English
Pages (from-to)	43-46
Number of pages	4
Journal	Journal of Photopolymer Science and Technology
Volume	25
Issue number	1
DOIs	https://doi.org/10.2494/photopolymer.25.43
Publication status	Published - 2012

Keywords

Photolithography
Proton beam writing
SU-8 photoresist
Supercritical drying
Three dimensional structure

ASJC Scopus subject areas

Polymers and Plastics
Organic Chemistry
Materials Chemistry

Access to Document

10.2494/photopolymer.25.43

Cite this

Microprocessing of arched bridge structures with epoxy resin by proton beam writing. / Takano, Katsuyoshi; Asano, Atsushi; Maeyoshi, Yuta; Marui, Hiromi; Omichi, Masaaki; Saeki, Akinori; Seki, Shu; Satoh, Takahiro; Ishii, Yasuyuki; Kamiya, Tomihiro; Koka, Masashi; Ohkubo, Takeru; Sugimoto, Masaki; Nishikawa, Hiroyuki.

In: Journal of Photopolymer Science and Technology, Vol. 25, No. 1, 2012, p. 43-46.

Research output: Contribution to journal › Article › peer-review

Takano, Katsuyoshi ; Asano, Atsushi ; Maeyoshi, Yuta ; Marui, Hiromi ; Omichi, Masaaki ; Saeki, Akinori ; Seki, Shu ; Satoh, Takahiro ; Ishii, Yasuyuki ; Kamiya, Tomihiro ; Koka, Masashi ; Ohkubo, Takeru ; Sugimoto, Masaki ; Nishikawa, Hiroyuki. / Microprocessing of arched bridge structures with epoxy resin by proton beam writing. In: Journal of Photopolymer Science and Technology. 2012 ; Vol. 25, No. 1. pp. 43-46.

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AU - Saeki, Akinori

AU - Seki, Shu

AU - Satoh, Takahiro

AU - Ishii, Yasuyuki

AU - Kamiya, Tomihiro

AU - Koka, Masashi

AU - Ohkubo, Takeru

AU - Sugimoto, Masaki

AU - Nishikawa, Hiroyuki

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