Microscopy of Si(001) surface defects produced by keV He ion irradiation at low temperatures

K.Kyuno K.Kyuno, D.G.Cahill D.G.Cahill, R.S.Averback R.S.Averback, J.Tarus J.Tarus, K.Nordlund K.Nordlund, Kentaro Kyuno

Research output: Contribution to journalArticle

Original languageEnglish
JournalAmerican Vacuum Society
Publication statusPublished - 1999 Oct 1

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K.Kyuno, K. K., D.G.Cahill, D. G. C., R.S.Averback, R. S. A., J.Tarus, J. T., K.Nordlund, K. N., & Kyuno, K. (1999). Microscopy of Si(001) surface defects produced by keV He ion irradiation at low temperatures. American Vacuum Society.