Microscopy of Si(001) surface defects produced by keV He ion irradiation at low temperatures

K.Kyuno K.Kyuno, D.G.Cahill D.G.Cahill, R.S.Averback R.S.Averback, J.Tarus J.Tarus, K.Nordlund K.Nordlund, Kentaro Kyuno

Research output: Contribution to journal › Article › peer-review

Cite this

@article{6a01f412f0ab482aad27d08f9b87f3b9,

title = "Microscopy of Si(001) surface defects produced by keV He ion irradiation at low temperatures",

author = "K.Kyuno K.Kyuno and D.G.Cahill D.G.Cahill and R.S.Averback R.S.Averback and J.Tarus J.Tarus and K.Nordlund K.Nordlund and Kentaro Kyuno",

year = "1999",

month = oct,

day = "1",

language = "English",

journal = "American Vacuum Society",

}