Microstructure of electroplated Cu films

H.Okabayashi H.Okabayashi, K.Ueno K.Ueno, N.Ito N.Ito, S.Saito S.Saito, E.Nomura E.Nomura, Kazuyoshi Ueno

Research output: Contribution to journalArticle

Original languageEnglish
JournalAdvanced Metallization Conference in 1999
Publication statusPublished - 1999 Oct 1

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H.Okabayashi, H. O., K.Ueno, K. U., N.Ito, N. I., S.Saito, S. S., E.Nomura, E. N., & Ueno, K. (1999). Microstructure of electroplated Cu films. Advanced Metallization Conference in 1999.