Microstructuring of silica and polymethylmethacrylate glasses by femtosecond irradiation for MEMS applications

Saulius Juodkazis; Kazuhiko Yamasaki; Andrius Marcinkevičius; Vygantas Mizeikis; Shigeki Matsuo; Hiroaki Misawa; Thomas Lippert

Microstructuring of silica and polymethylmethacrylate glasses by femtosecond irradiation for MEMS applications

Saulius Juodkazis, Kazuhiko Yamasaki, Andrius Marcinkevičius, Vygantas Mizeikis, Shigeki Matsuo, Hiroaki Misawa, Thomas Lippert

Research output: Contribution to journal › Article › peer-review

14 Citations (Scopus)

Abstract

We report the fabrication of complex 3D microstructures in silica and polymethylmethacrylate glass by a combination of femtosecond laser microfabrication and chemical wet etching techniques. It is demonstrated that fabrication of interconnected network of channels having lengths of about 200 μm, and diameters as small as 10 μm is possible due to the enhanced etching selectivity (typically 20 - 60) in the laser-irradiated regions. Thus, it becomes feasible to form 3D micro-fluidic and photonic crystal structures in transparent glass-like materials using this approach. In addition, preliminary results on microstructuring of rubber are presented.

Original language	English
Pages (from-to)	173-178
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	687
Publication status	Published - 2002
Externally published	Yes

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Cite this

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abstract = "We report the fabrication of complex 3D microstructures in silica and polymethylmethacrylate glass by a combination of femtosecond laser microfabrication and chemical wet etching techniques. It is demonstrated that fabrication of interconnected network of channels having lengths of about 200 μm, and diameters as small as 10 μm is possible due to the enhanced etching selectivity (typically 20 - 60) in the laser-irradiated regions. Thus, it becomes feasible to form 3D micro-fluidic and photonic crystal structures in transparent glass-like materials using this approach. In addition, preliminary results on microstructuring of rubber are presented.",

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T1 - Microstructuring of silica and polymethylmethacrylate glasses by femtosecond irradiation for MEMS applications

AU - Juodkazis, Saulius

AU - Yamasaki, Kazuhiko

AU - Marcinkevičius, Andrius

AU - Mizeikis, Vygantas

AU - Matsuo, Shigeki

AU - Misawa, Hiroaki

AU - Lippert, Thomas

PY - 2002

Y1 - 2002

N2 - We report the fabrication of complex 3D microstructures in silica and polymethylmethacrylate glass by a combination of femtosecond laser microfabrication and chemical wet etching techniques. It is demonstrated that fabrication of interconnected network of channels having lengths of about 200 μm, and diameters as small as 10 μm is possible due to the enhanced etching selectivity (typically 20 - 60) in the laser-irradiated regions. Thus, it becomes feasible to form 3D micro-fluidic and photonic crystal structures in transparent glass-like materials using this approach. In addition, preliminary results on microstructuring of rubber are presented.

AB - We report the fabrication of complex 3D microstructures in silica and polymethylmethacrylate glass by a combination of femtosecond laser microfabrication and chemical wet etching techniques. It is demonstrated that fabrication of interconnected network of channels having lengths of about 200 μm, and diameters as small as 10 μm is possible due to the enhanced etching selectivity (typically 20 - 60) in the laser-irradiated regions. Thus, it becomes feasible to form 3D micro-fluidic and photonic crystal structures in transparent glass-like materials using this approach. In addition, preliminary results on microstructuring of rubber are presented.

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M3 - Article

AN - SCOPUS:0036353769

SN - 0272-9172

VL - 687

SP - 173

EP - 178

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

ER -

Microstructuring of silica and polymethylmethacrylate glasses by femtosecond irradiation for MEMS applications

Abstract

ASJC Scopus subject areas

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