Abstract
We report the fabrication of complex 3D microstructures in silica and polymethylmethacrylate glass by a combination of femtosecond laser microfabrication and chemical wet etching techniques. It is demonstrated that fabrication of interconnected network of channels having lengths of about 200 μm, and diameters as small as 10 μm is possible due to the enhanced etching selectivity (typically 20 - 60) in the laser-irradiated regions. Thus, it becomes feasible to form 3D micro-fluidic and photonic crystal structures in transparent glass-like materials using this approach. In addition, preliminary results on microstructuring of rubber are presented.
| Original language | English |
|---|---|
| Pages (from-to) | 173-178 |
| Number of pages | 6 |
| Journal | Materials Research Society Symposium - Proceedings |
| Volume | 687 |
| Publication status | Published - 2002 Jan 1 |
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ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering
Cite this
Juodkazis, S., Yamasaki, K., Marcinkevičius, A., Mizeikis, V., Matsuo, S., Misawa, H., & Lippert, T. (2002). Microstructuring of silica and polymethylmethacrylate glasses by femtosecond irradiation for MEMS applications. Materials Research Society Symposium - Proceedings, 687, 173-178.