Microstructuring of silica and polymethylmethacrylate glasses by femtosecond irradiation for MEMS applications

Saulius Juodkazis, Kazuhiko Yamasaki, Andrius Marcinkevičius, Vygantas Mizeikis, Shigeki Matsuo, Hiroaki Misawa, Thomas Lippert

Research output: Contribution to journalArticle

Abstract

We report the fabrication of complex 3D microstructures in silica and polymethylmethacrylate glass by a combination of femtosecond laser microfabrication and chemical wet etching techniques. It is demonstrated that fabrication of interconnected network of channels having lengths of about 200 μm, and diameters as small as 10 μm is possible due to the enhanced etching selectivity (typically 20 - 60) in the laser-irradiated regions. Thus, it becomes feasible to form 3D micro-fluidic and photonic crystal structures in transparent glass-like materials using this approach. In addition, preliminary results on microstructuring of rubber are presented.

Original languageEnglish
Pages (from-to)173-178
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume687
Publication statusPublished - 2002 Jan 1

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ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Juodkazis, S., Yamasaki, K., Marcinkevičius, A., Mizeikis, V., Matsuo, S., Misawa, H., & Lippert, T. (2002). Microstructuring of silica and polymethylmethacrylate glasses by femtosecond irradiation for MEMS applications. Materials Research Society Symposium - Proceedings, 687, 173-178.