Microstructuring of silica and polymethylmethacrylate glasses by femtosecond irradiation for MEMS applications

Saulius Juodkazis; Kazuhiko Yamasaki; Andrius Marcinkevičius; Vygantas Mizeikis; Shigeki Matsuo; Hiroaki Misawa; Thomas Lippert

Microstructuring of silica and polymethylmethacrylate glasses by femtosecond irradiation for MEMS applications

Saulius Juodkazis, Kazuhiko Yamasaki, Andrius Marcinkevičius, Vygantas Mizeikis, Shigeki Matsuo, Hiroaki Misawa, Thomas Lippert

Research output: Contribution to journal › Article › peer-review

13 Citations (Scopus)

Abstract

We report the fabrication of complex 3D microstructures in silica and polymethylmethacrylate glass by a combination of femtosecond laser microfabrication and chemical wet etching techniques. It is demonstrated that fabrication of interconnected network of channels having lengths of about 200 μm, and diameters as small as 10 μm is possible due to the enhanced etching selectivity (typically 20 - 60) in the laser-irradiated regions. Thus, it becomes feasible to form 3D micro-fluidic and photonic crystal structures in transparent glass-like materials using this approach. In addition, preliminary results on microstructuring of rubber are presented.

Original language	English
Pages (from-to)	173-178
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	687
Publication status	Published - 2002 Jan 1
Externally published	Yes

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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Microstructuring of silica and polymethylmethacrylate glasses by femtosecond irradiation for MEMS applications. / Juodkazis, Saulius; Yamasaki, Kazuhiko; Marcinkevičius, Andrius; Mizeikis, Vygantas; Matsuo, Shigeki; Misawa, Hiroaki; Lippert, Thomas.

In: Materials Research Society Symposium - Proceedings, Vol. 687, 01.01.2002, p. 173-178.

Research output: Contribution to journal › Article › peer-review

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AU - Juodkazis, Saulius

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AU - Mizeikis, Vygantas

AU - Matsuo, Shigeki

AU - Misawa, Hiroaki

AU - Lippert, Thomas

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