Microstructuring of silica and polymethylmethacrylate glasses by femtosecond irradiation for MEMS applications

Saulius Juodkazis, Kazuhiko Yamasaki, Andrius Marcinkevičius, Vygantas Mizeikis, Shigeki Matsuo, Hiroaki Misawa, Thomas Lippert

Research output: Chapter in Book/Report/Conference proceedingConference contribution

12 Citations (Scopus)

Abstract

We report the fabrication of complex 3D microstructures in silica and polymethylmethacrylate glass by a combination of femtosecond laser microfabrication and chemical wet etching techniques. It is demonstrated that fabrication of interconnected network of channels having lengths of about 200 μm, and diameters as small as 10 μm is possible due to the enhanced etching selectivity (typically 20 - 60) in the laser-irradiated regions. Thus, it becomes feasible to form 3D micro-fluidic and photonic crystal structures in transparent glass-like materials using this approach. In addition, preliminary results on microstructuring of rubber are presented.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium - Proceedings
Pages173-178
Number of pages6
Volume687
Publication statusPublished - 2002
Externally publishedYes
EventMaterials Science of Microelectromechanical Systems (MEMS) Devices IV - Boston, MA, United States
Duration: 2001 Nov 252001 Nov 28

Other

OtherMaterials Science of Microelectromechanical Systems (MEMS) Devices IV
CountryUnited States
CityBoston, MA
Period01/11/2501/11/28

Fingerprint

Polymethyl Methacrylate
Silicon Dioxide
MEMS
Silica
Irradiation
Fabrication
Glass
Wet etching
Microfabrication
Rubber
Fluidics
Photonic crystals
Ultrashort pulses
Etching
Crystal structure
Microstructure
Lasers

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Juodkazis, S., Yamasaki, K., Marcinkevičius, A., Mizeikis, V., Matsuo, S., Misawa, H., & Lippert, T. (2002). Microstructuring of silica and polymethylmethacrylate glasses by femtosecond irradiation for MEMS applications. In Materials Research Society Symposium - Proceedings (Vol. 687, pp. 173-178)

Microstructuring of silica and polymethylmethacrylate glasses by femtosecond irradiation for MEMS applications. / Juodkazis, Saulius; Yamasaki, Kazuhiko; Marcinkevičius, Andrius; Mizeikis, Vygantas; Matsuo, Shigeki; Misawa, Hiroaki; Lippert, Thomas.

Materials Research Society Symposium - Proceedings. Vol. 687 2002. p. 173-178.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Juodkazis, S, Yamasaki, K, Marcinkevičius, A, Mizeikis, V, Matsuo, S, Misawa, H & Lippert, T 2002, Microstructuring of silica and polymethylmethacrylate glasses by femtosecond irradiation for MEMS applications. in Materials Research Society Symposium - Proceedings. vol. 687, pp. 173-178, Materials Science of Microelectromechanical Systems (MEMS) Devices IV, Boston, MA, United States, 01/11/25.
Juodkazis S, Yamasaki K, Marcinkevičius A, Mizeikis V, Matsuo S, Misawa H et al. Microstructuring of silica and polymethylmethacrylate glasses by femtosecond irradiation for MEMS applications. In Materials Research Society Symposium - Proceedings. Vol. 687. 2002. p. 173-178
Juodkazis, Saulius ; Yamasaki, Kazuhiko ; Marcinkevičius, Andrius ; Mizeikis, Vygantas ; Matsuo, Shigeki ; Misawa, Hiroaki ; Lippert, Thomas. / Microstructuring of silica and polymethylmethacrylate glasses by femtosecond irradiation for MEMS applications. Materials Research Society Symposium - Proceedings. Vol. 687 2002. pp. 173-178
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