Abstract
We report the fabrication of complex 3D microstructures in silica and polymethylmethacrylate glass by a combination of femtosecond laser microfabrication and chemical wet etching techniques. It is demonstrated that fabrication of interconnected network of channels having lengths of about 200 μm, and diameters as small as 10 μm is possible due to the enhanced etching selectivity (typically 20 - 60) in the laser-irradiated regions. Thus, it becomes feasible to form 3D micro-fluidic and photonic crystal structures in transparent glass-like materials using this approach. In addition, preliminary results on microstructuring of rubber are presented.
| Original language | English |
|---|---|
| Title of host publication | Materials Research Society Symposium - Proceedings |
| Pages | 173-178 |
| Number of pages | 6 |
| Volume | 687 |
| Publication status | Published - 2002 |
| Externally published | Yes |
| Event | Materials Science of Microelectromechanical Systems (MEMS) Devices IV - Boston, MA, United States Duration: 2001 Nov 25 → 2001 Nov 28 |
Other
| Other | Materials Science of Microelectromechanical Systems (MEMS) Devices IV |
|---|---|
| Country | United States |
| City | Boston, MA |
| Period | 01/11/25 → 01/11/28 |
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ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
Cite this
Microstructuring of silica and polymethylmethacrylate glasses by femtosecond irradiation for MEMS applications. / Juodkazis, Saulius; Yamasaki, Kazuhiko; Marcinkevičius, Andrius; Mizeikis, Vygantas; Matsuo, Shigeki; Misawa, Hiroaki; Lippert, Thomas.
Materials Research Society Symposium - Proceedings. Vol. 687 2002. p. 173-178.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Microstructuring of silica and polymethylmethacrylate glasses by femtosecond irradiation for MEMS applications
AU - Juodkazis, Saulius
AU - Yamasaki, Kazuhiko
AU - Marcinkevičius, Andrius
AU - Mizeikis, Vygantas
AU - Matsuo, Shigeki
AU - Misawa, Hiroaki
AU - Lippert, Thomas
PY - 2002
Y1 - 2002
N2 - We report the fabrication of complex 3D microstructures in silica and polymethylmethacrylate glass by a combination of femtosecond laser microfabrication and chemical wet etching techniques. It is demonstrated that fabrication of interconnected network of channels having lengths of about 200 μm, and diameters as small as 10 μm is possible due to the enhanced etching selectivity (typically 20 - 60) in the laser-irradiated regions. Thus, it becomes feasible to form 3D micro-fluidic and photonic crystal structures in transparent glass-like materials using this approach. In addition, preliminary results on microstructuring of rubber are presented.
AB - We report the fabrication of complex 3D microstructures in silica and polymethylmethacrylate glass by a combination of femtosecond laser microfabrication and chemical wet etching techniques. It is demonstrated that fabrication of interconnected network of channels having lengths of about 200 μm, and diameters as small as 10 μm is possible due to the enhanced etching selectivity (typically 20 - 60) in the laser-irradiated regions. Thus, it becomes feasible to form 3D micro-fluidic and photonic crystal structures in transparent glass-like materials using this approach. In addition, preliminary results on microstructuring of rubber are presented.
UR - http://www.scopus.com/inward/record.url?scp=0036353769&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0036353769&partnerID=8YFLogxK
M3 - Conference contribution
VL - 687
SP - 173
EP - 178
BT - Materials Research Society Symposium - Proceedings
ER -