TY - JOUR
T1 - Microwave-assisted atmospheric pressure plasma polymerization of hexamethyldisiloxane
AU - Matsubayashi, Toshiki
AU - Hidaka, Hiroki
AU - Muguruma, Hitoshi
N1 - Publisher Copyright:
© 2016 The Japan Society of Applied Physics.
PY - 2016/7
Y1 - 2016/7
N2 - Microwave-assisted atmospheric pressure plasma polymerization is presented. A system with a re-entrant microwave cavity realizes simple matching, stable plasma, and free space under the orifice of plasma steam. Hexamethyldisiloxane is employed as a monomer, while argon is used as a carrier gas. The effective area of the hydrophobic coating film used corresponds to a circle of 20mm diameter and the deposition rate considered is 5 nm/min. Matrix-assisted laser desorption/ionization time-of-flight mass spectroscopy shows that the coating film has a large molecular weight (>200 kDa), suggesting that a high-crosslinking and three-dimensional polymer matrix is formed and microwave-assisted atmospheric pressure plasma polymerization is fulfilled.
AB - Microwave-assisted atmospheric pressure plasma polymerization is presented. A system with a re-entrant microwave cavity realizes simple matching, stable plasma, and free space under the orifice of plasma steam. Hexamethyldisiloxane is employed as a monomer, while argon is used as a carrier gas. The effective area of the hydrophobic coating film used corresponds to a circle of 20mm diameter and the deposition rate considered is 5 nm/min. Matrix-assisted laser desorption/ionization time-of-flight mass spectroscopy shows that the coating film has a large molecular weight (>200 kDa), suggesting that a high-crosslinking and three-dimensional polymer matrix is formed and microwave-assisted atmospheric pressure plasma polymerization is fulfilled.
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U2 - 10.7567/JJAP.55.076201
DO - 10.7567/JJAP.55.076201
M3 - Article
AN - SCOPUS:84976508067
SN - 0021-4922
VL - 55
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 7
M1 - 076201
ER -