Microwave-assisted atmospheric pressure plasma polymerization of hexamethyldisiloxane

Toshiki Matsubayashi, Hiroki Hidaka, Hitoshi Muguruma

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Microwave-assisted atmospheric pressure plasma polymerization is presented. A system with a re-entrant microwave cavity realizes simple matching, stable plasma, and free space under the orifice of plasma steam. Hexamethyldisiloxane is employed as a monomer, while argon is used as a carrier gas. The effective area of the hydrophobic coating film used corresponds to a circle of 20mm diameter and the deposition rate considered is 5 nm/min. Matrix-assisted laser desorption/ionization time-of-flight mass spectroscopy shows that the coating film has a large molecular weight (>200 kDa), suggesting that a high-crosslinking and three-dimensional polymer matrix is formed and microwave-assisted atmospheric pressure plasma polymerization is fulfilled.

Original languageEnglish
Article number076201
JournalJapanese Journal of Applied Physics
Volume55
Issue number7
DOIs
Publication statusPublished - 2016 Jul 1

Fingerprint

Plasma polymerization
Atmospheric pressure
atmospheric pressure
polymerization
Microwaves
microwaves
Plasmas
Coatings
Orifices
Deposition rates
Polymer matrix
coatings
Crosslinking
Ionization
Argon
Desorption
orifices
Steam
crosslinking
matrices

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Microwave-assisted atmospheric pressure plasma polymerization of hexamethyldisiloxane. / Matsubayashi, Toshiki; Hidaka, Hiroki; Muguruma, Hitoshi.

In: Japanese Journal of Applied Physics, Vol. 55, No. 7, 076201, 01.07.2016.

Research output: Contribution to journalArticle

@article{0b5454c585004b6da6b6d9b0c2541733,
title = "Microwave-assisted atmospheric pressure plasma polymerization of hexamethyldisiloxane",
abstract = "Microwave-assisted atmospheric pressure plasma polymerization is presented. A system with a re-entrant microwave cavity realizes simple matching, stable plasma, and free space under the orifice of plasma steam. Hexamethyldisiloxane is employed as a monomer, while argon is used as a carrier gas. The effective area of the hydrophobic coating film used corresponds to a circle of 20mm diameter and the deposition rate considered is 5 nm/min. Matrix-assisted laser desorption/ionization time-of-flight mass spectroscopy shows that the coating film has a large molecular weight (>200 kDa), suggesting that a high-crosslinking and three-dimensional polymer matrix is formed and microwave-assisted atmospheric pressure plasma polymerization is fulfilled.",
author = "Toshiki Matsubayashi and Hiroki Hidaka and Hitoshi Muguruma",
year = "2016",
month = "7",
day = "1",
doi = "10.7567/JJAP.55.076201",
language = "English",
volume = "55",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "7",

}

TY - JOUR

T1 - Microwave-assisted atmospheric pressure plasma polymerization of hexamethyldisiloxane

AU - Matsubayashi, Toshiki

AU - Hidaka, Hiroki

AU - Muguruma, Hitoshi

PY - 2016/7/1

Y1 - 2016/7/1

N2 - Microwave-assisted atmospheric pressure plasma polymerization is presented. A system with a re-entrant microwave cavity realizes simple matching, stable plasma, and free space under the orifice of plasma steam. Hexamethyldisiloxane is employed as a monomer, while argon is used as a carrier gas. The effective area of the hydrophobic coating film used corresponds to a circle of 20mm diameter and the deposition rate considered is 5 nm/min. Matrix-assisted laser desorption/ionization time-of-flight mass spectroscopy shows that the coating film has a large molecular weight (>200 kDa), suggesting that a high-crosslinking and three-dimensional polymer matrix is formed and microwave-assisted atmospheric pressure plasma polymerization is fulfilled.

AB - Microwave-assisted atmospheric pressure plasma polymerization is presented. A system with a re-entrant microwave cavity realizes simple matching, stable plasma, and free space under the orifice of plasma steam. Hexamethyldisiloxane is employed as a monomer, while argon is used as a carrier gas. The effective area of the hydrophobic coating film used corresponds to a circle of 20mm diameter and the deposition rate considered is 5 nm/min. Matrix-assisted laser desorption/ionization time-of-flight mass spectroscopy shows that the coating film has a large molecular weight (>200 kDa), suggesting that a high-crosslinking and three-dimensional polymer matrix is formed and microwave-assisted atmospheric pressure plasma polymerization is fulfilled.

UR - http://www.scopus.com/inward/record.url?scp=84976508067&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84976508067&partnerID=8YFLogxK

U2 - 10.7567/JJAP.55.076201

DO - 10.7567/JJAP.55.076201

M3 - Article

VL - 55

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 7

M1 - 076201

ER -