MoCl5 intercalation doping and oxygen passivation of submicrometer-sized multilayer graphene

Hisao Miyazaki, Rika Matsumoto, Masayuki Katagiri, Takashi Yoshida, Kazuyoshi Ueno, Tadashi Sakai, Akihiro Kajita

Research output: Contribution to journalArticle

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Abstract

We investigated doping material selection for multilayer graphene (MLG) interconnects and a passivation process to stabilize the doped state. Intercalation doping with Br2, FeCl3, and MoCl5 was compared in terms of doping ability and robustness against environmental effects, which are exacerbated by miniaturization. We found that MoCl5 was advantageous for miniaturization. We hypothesized that environmental stability would be enhanced by partially oxidizing MoCl5 and avoiding hydrolysis by water vapor in air. To test this, we examined a passivation process by dry oxygen exposure. We verified that the doping effect was improved and that intercalated material (MoCl5) was partially oxidized and confined in the MLG.

LanguageEnglish
Article number04CP02
JournalJapanese Journal of Applied Physics
Volume56
Issue number4
DOIs
StatePublished - 2017 Apr 1

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Intercalation
Passivation
intercalation
Graphene
passivity
graphene
Multilayers
Doping (additives)
miniaturization
Oxygen
oxygen
doping (materials)
materials selection
hydrolysis
water vapor
Water vapor
Environmental impact
Hydrolysis
air
Air

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Miyazaki, H., Matsumoto, R., Katagiri, M., Yoshida, T., Ueno, K., Sakai, T., & Kajita, A. (2017). MoCl5 intercalation doping and oxygen passivation of submicrometer-sized multilayer graphene. Japanese Journal of Applied Physics, 56(4), [04CP02]. DOI: 10.7567/JJAP.56.04CP02

MoCl5 intercalation doping and oxygen passivation of submicrometer-sized multilayer graphene. / Miyazaki, Hisao; Matsumoto, Rika; Katagiri, Masayuki; Yoshida, Takashi; Ueno, Kazuyoshi; Sakai, Tadashi; Kajita, Akihiro.

In: Japanese Journal of Applied Physics, Vol. 56, No. 4, 04CP02, 01.04.2017.

Research output: Contribution to journalArticle

Miyazaki, H, Matsumoto, R, Katagiri, M, Yoshida, T, Ueno, K, Sakai, T & Kajita, A 2017, 'MoCl5 intercalation doping and oxygen passivation of submicrometer-sized multilayer graphene' Japanese Journal of Applied Physics, vol 56, no. 4, 04CP02. DOI: 10.7567/JJAP.56.04CP02
Miyazaki H, Matsumoto R, Katagiri M, Yoshida T, Ueno K, Sakai T et al. MoCl5 intercalation doping and oxygen passivation of submicrometer-sized multilayer graphene. Japanese Journal of Applied Physics. 2017 Apr 1;56(4). 04CP02. Available from, DOI: 10.7567/JJAP.56.04CP02
Miyazaki, Hisao ; Matsumoto, Rika ; Katagiri, Masayuki ; Yoshida, Takashi ; Ueno, Kazuyoshi ; Sakai, Tadashi ; Kajita, Akihiro. / MoCl5 intercalation doping and oxygen passivation of submicrometer-sized multilayer graphene. In: Japanese Journal of Applied Physics. 2017 ; Vol. 56, No. 4.
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