MoCl5 intercalation doping and oxygen passivation of submicrometer-sized multilayer graphene

Hisao Miyazaki; Rika Matsumoto; Masayuki Katagiri; Takashi Yoshida; Kazuyoshi Ueno; Tadashi Sakai; Akihiro Kajita

doi:10.7567/JJAP.56.04CP02

MoCl5 intercalation doping and oxygen passivation of submicrometer-sized multilayer graphene

Hisao Miyazaki, Rika Matsumoto, Masayuki Katagiri, Takashi Yoshida, Kazuyoshi Ueno, Tadashi Sakai, Akihiro Kajita

Research output: Contribution to journal › Article › peer-review

18 Citations (Scopus)

Abstract

We investigated doping material selection for multilayer graphene (MLG) interconnects and a passivation process to stabilize the doped state. Intercalation doping with Br2, FeCl3, and MoCl5 was compared in terms of doping ability and robustness against environmental effects, which are exacerbated by miniaturization. We found that MoCl5 was advantageous for miniaturization. We hypothesized that environmental stability would be enhanced by partially oxidizing MoCl5 and avoiding hydrolysis by water vapor in air. To test this, we examined a passivation process by dry oxygen exposure. We verified that the doping effect was improved and that intercalated material (MoCl5) was partially oxidized and confined in the MLG.

Original language	English
Article number	04CP02
Journal	Japanese Journal of Applied Physics
Volume	56
Issue number	4
DOIs	https://doi.org/10.7567/JJAP.56.04CP02
Publication status	Published - 2017 Apr

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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title = "MoCl5 intercalation doping and oxygen passivation of submicrometer-sized multilayer graphene",

abstract = "We investigated doping material selection for multilayer graphene (MLG) interconnects and a passivation process to stabilize the doped state. Intercalation doping with Br2, FeCl3, and MoCl5 was compared in terms of doping ability and robustness against environmental effects, which are exacerbated by miniaturization. We found that MoCl5 was advantageous for miniaturization. We hypothesized that environmental stability would be enhanced by partially oxidizing MoCl5 and avoiding hydrolysis by water vapor in air. To test this, we examined a passivation process by dry oxygen exposure. We verified that the doping effect was improved and that intercalated material (MoCl5) was partially oxidized and confined in the MLG.",

author = "Hisao Miyazaki and Rika Matsumoto and Masayuki Katagiri and Takashi Yoshida and Kazuyoshi Ueno and Tadashi Sakai and Akihiro Kajita",

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T1 - MoCl5 intercalation doping and oxygen passivation of submicrometer-sized multilayer graphene

AU - Miyazaki, Hisao

AU - Matsumoto, Rika

AU - Katagiri, Masayuki

AU - Yoshida, Takashi

AU - Ueno, Kazuyoshi

AU - Sakai, Tadashi

AU - Kajita, Akihiro

PY - 2017/4

Y1 - 2017/4

N2 - We investigated doping material selection for multilayer graphene (MLG) interconnects and a passivation process to stabilize the doped state. Intercalation doping with Br2, FeCl3, and MoCl5 was compared in terms of doping ability and robustness against environmental effects, which are exacerbated by miniaturization. We found that MoCl5 was advantageous for miniaturization. We hypothesized that environmental stability would be enhanced by partially oxidizing MoCl5 and avoiding hydrolysis by water vapor in air. To test this, we examined a passivation process by dry oxygen exposure. We verified that the doping effect was improved and that intercalated material (MoCl5) was partially oxidized and confined in the MLG.

AB - We investigated doping material selection for multilayer graphene (MLG) interconnects and a passivation process to stabilize the doped state. Intercalation doping with Br2, FeCl3, and MoCl5 was compared in terms of doping ability and robustness against environmental effects, which are exacerbated by miniaturization. We found that MoCl5 was advantageous for miniaturization. We hypothesized that environmental stability would be enhanced by partially oxidizing MoCl5 and avoiding hydrolysis by water vapor in air. To test this, we examined a passivation process by dry oxygen exposure. We verified that the doping effect was improved and that intercalated material (MoCl5) was partially oxidized and confined in the MLG.

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MoCl5 intercalation doping and oxygen passivation of submicrometer-sized multilayer graphene

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