MOCVD-TiN barrirer for blanket W-CVD

K.Ohto K.Ohto, K.Ueno K.Ueno, K.Tsunenari K.Tsunenari, K.Numajiri K.Numajiri, M.Okamura M.Okamura, H.Jinba H.Jinba, Kazuyoshi Ueno

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)151-157
JournalAdvanced Metallization for ULSI Applications in 1993
Publication statusPublished - 1993 Oct 1

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K.Ohto, K. O., K.Ueno, K. U., K.Tsunenari, K. T., K.Numajiri, K. N., M.Okamura, M. O., H.Jinba, H. J., & Ueno, K. (1993). MOCVD-TiN barrirer for blanket W-CVD. Advanced Metallization for ULSI Applications in 1993, 151-157.