Model predictive control to minimize movements in positions on plate with change in generation of noise-heat

Shigeki Hirasawa, Tsuyoshi Kawanami, Katsuaki Shirai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Precise temperature control to decrease movements in positions due to thermal expansion of work pieces is required in the manufacturing processes to achieve nanometer-order accuracy. We analytically examined the effect of a method of minimizing movements in positions on a plate with a change in generation of noise-heat. Control by monitoring temperature caused larger movements in positions than that without control because maximum change in temperature occurred at non-monitoring positions. The best method of minimizing movements in positions due to thermal expansion of a plate with a change in the generation of noise-heat was model predictive control by the monitoring movements and distributed temperature changes in the control heater according to the effects of the generation of noiseheat. The maximum movement in positions was 6 nm, which was 1/4 times of that without control.

Original languageEnglish
Title of host publicationProceedings of the 4th International Conference on Control, Mechatronics and Automation, ICCMA 2016
PublisherAssociation for Computing Machinery
Pages111-116
Number of pages6
ISBN (Electronic)9781450352130
DOIs
Publication statusPublished - 2016 Dec 7
Externally publishedYes
Event4th International Conference on Control, Mechatronics and Automation, ICCMA 2016 - Barcelona, Spain
Duration: 2016 Dec 72016 Dec 11

Other

Other4th International Conference on Control, Mechatronics and Automation, ICCMA 2016
CountrySpain
CityBarcelona
Period16/12/716/12/11

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Keywords

  • Heat transfer
  • Model predictive control
  • Precise temperature control
  • Process control
  • Thermal expansion

ASJC Scopus subject areas

  • Human-Computer Interaction
  • Computer Networks and Communications
  • Computer Vision and Pattern Recognition
  • Software

Cite this

Hirasawa, S., Kawanami, T., & Shirai, K. (2016). Model predictive control to minimize movements in positions on plate with change in generation of noise-heat. In Proceedings of the 4th International Conference on Control, Mechatronics and Automation, ICCMA 2016 (pp. 111-116). Association for Computing Machinery. https://doi.org/10.1145/3029610.3029611