Moisture barrier properties of single-layer graphene deposited on Cu films for Cu metallization

Ploybussara Gomasang, Takumi Abe, Kenji Kawahara, Yoko Wasai, Nataliya Nabatova-Gabain, Nguyen Thanh Cuong, Hiroki Ago, Susumu Okada, Kazuyoshi Ueno

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

The moisture barrier properties of large-grain single-layer graphene (SLG) deposited on a Cu(111)/sapphire substrate are demonstrated by comparing with the bare Cu(111) surface under an accelerated degradation test (ADT) at 85°C and 85% relative humidity (RH) for various durations. The change in surface color and the formation of Cu oxide are investigated by optical microscopy (OM) and X-ray photoelectron spectroscopy (XPS), respectively. First-principle simulation is performed to understand the mechanisms underlying the barrier properties of SLG against O diffusion. The correlation between Cu oxide thickness and SLG quality are also analyzed by spectroscopic ellipsometry (SE) measured on a non-uniform SLG film. SLG with large grains shows high performance in preventing the Cu oxidation due to moisture during ADT.

Original languageEnglish
Article number04FC08
JournalJapanese Journal of Applied Physics
Volume57
Issue number4
DOIs
Publication statusPublished - 2018 Apr 1

Fingerprint

Metallizing
moisture
Graphene
graphene
Moisture
degradation
Degradation
Oxides
oxides
Spectroscopic ellipsometry
Sapphire
ellipsometry
Optical microscopy
humidity
Atmospheric humidity
sapphire
X ray photoelectron spectroscopy
photoelectron spectroscopy
microscopy
Color

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Moisture barrier properties of single-layer graphene deposited on Cu films for Cu metallization. / Gomasang, Ploybussara; Abe, Takumi; Kawahara, Kenji; Wasai, Yoko; Nabatova-Gabain, Nataliya; Cuong, Nguyen Thanh; Ago, Hiroki; Okada, Susumu; Ueno, Kazuyoshi.

In: Japanese Journal of Applied Physics, Vol. 57, No. 4, 04FC08, 01.04.2018.

Research output: Contribution to journalArticle

Gomasang, P, Abe, T, Kawahara, K, Wasai, Y, Nabatova-Gabain, N, Cuong, NT, Ago, H, Okada, S & Ueno, K 2018, 'Moisture barrier properties of single-layer graphene deposited on Cu films for Cu metallization', Japanese Journal of Applied Physics, vol. 57, no. 4, 04FC08. https://doi.org/10.7567/JJAP.57.04FC08
Gomasang, Ploybussara ; Abe, Takumi ; Kawahara, Kenji ; Wasai, Yoko ; Nabatova-Gabain, Nataliya ; Cuong, Nguyen Thanh ; Ago, Hiroki ; Okada, Susumu ; Ueno, Kazuyoshi. / Moisture barrier properties of single-layer graphene deposited on Cu films for Cu metallization. In: Japanese Journal of Applied Physics. 2018 ; Vol. 57, No. 4.
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