Morphology of iron silicide nanorods formed by electron-beam-induced deposition using ultrahigh-vacuum transmission electron microscope

Miyoko Tanaka, Ming Han, Masaki Takeguchi, Fengmin Chu, Masayuki Shimojo, Kazutaka Mitsuishi, Kazuo Furuya

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

We have fabricated Fe suicide nanorods on Si(111) substrates by both deposition at high temperatures and electron-beam-induced deposition (EBID), and observed them with an ultrahigh-vacuum transmission electron microscope. The formation of either nanotriangles or nanorods was observed depending on the surface geometry of the substrates. The nanorods grew along one of the Si〈110〉 directions. In the case of EBID, the size and position of the deposits were controlled by adjusting irradiation time and the position of the electron beams. The longest rods almost reached about 100 nm in length with a 10 nm width.

Original languageEnglish
Pages (from-to)5635-5638
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume44
Issue number7 B
DOIs
Publication statusPublished - 2005 Jul 26
Externally publishedYes

Fingerprint

Ultrahigh vacuum
Nanorods
ultrahigh vacuum
nanorods
Electron beams
Electron microscopes
electron microscopes
electron beams
Iron
iron
surface geometry
Substrates
rods
Deposits
adjusting
deposits
Irradiation
irradiation
Geometry
Temperature

Keywords

  • Electron-beam-induced deposition
  • Iron suicide
  • Nanorods
  • Transmission electron microscopy
  • Ultrahigh-vacuum

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Morphology of iron silicide nanorods formed by electron-beam-induced deposition using ultrahigh-vacuum transmission electron microscope. / Tanaka, Miyoko; Han, Ming; Takeguchi, Masaki; Chu, Fengmin; Shimojo, Masayuki; Mitsuishi, Kazutaka; Furuya, Kazuo.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 44, No. 7 B, 26.07.2005, p. 5635-5638.

Research output: Contribution to journalArticle

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