Multi-channel chemical sensor using surface acoustic wave device

T. Nomura, Atsushi Saitoh, S. Furukawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Multi-channel SAW chemical sensor is first used to analytical system for organic gas detection. SAW sensors are easy to show a high frequency property, and can become multi-channel devices on a substrate. The features improve a sensor sensitivity and enables integration of sensor. In this paper, we propose a new chemical sensor system using multi-channel SAW devices. A four channel SAW delay line was designed and fabricated on one piezoelectric substrate. Each channel was coated by a different selective organic film and the output of the each channel was used to make a response pattern. The each response to odorant solvents showed the different analyte specific patterns.

Original languageEnglish
Title of host publicationProceedings of the IEEE Ultrasonics Symposium
EditorsS.C. Schneider, M. Levy, B.R. McAvoy
PublisherIEEE
Pages423-426
Number of pages4
Volume1
Publication statusPublished - 1997
EventProceedings of the 1997 IEEE Ultrasonics Symposium. Part 1 (of 2) - Toronto, Can
Duration: 1997 Oct 51997 Oct 8

Other

OtherProceedings of the 1997 IEEE Ultrasonics Symposium. Part 1 (of 2)
CityToronto, Can
Period97/10/597/10/8

Fingerprint

Acoustic surface wave devices
Chemical sensors
Sensors
Electric delay lines
Substrates
Gases

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Nomura, T., Saitoh, A., & Furukawa, S. (1997). Multi-channel chemical sensor using surface acoustic wave device. In S. C. Schneider, M. Levy, & B. R. McAvoy (Eds.), Proceedings of the IEEE Ultrasonics Symposium (Vol. 1, pp. 423-426). IEEE.

Multi-channel chemical sensor using surface acoustic wave device. / Nomura, T.; Saitoh, Atsushi; Furukawa, S.

Proceedings of the IEEE Ultrasonics Symposium. ed. / S.C. Schneider; M. Levy; B.R. McAvoy. Vol. 1 IEEE, 1997. p. 423-426.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nomura, T, Saitoh, A & Furukawa, S 1997, Multi-channel chemical sensor using surface acoustic wave device. in SC Schneider, M Levy & BR McAvoy (eds), Proceedings of the IEEE Ultrasonics Symposium. vol. 1, IEEE, pp. 423-426, Proceedings of the 1997 IEEE Ultrasonics Symposium. Part 1 (of 2), Toronto, Can, 97/10/5.
Nomura T, Saitoh A, Furukawa S. Multi-channel chemical sensor using surface acoustic wave device. In Schneider SC, Levy M, McAvoy BR, editors, Proceedings of the IEEE Ultrasonics Symposium. Vol. 1. IEEE. 1997. p. 423-426
Nomura, T. ; Saitoh, Atsushi ; Furukawa, S. / Multi-channel chemical sensor using surface acoustic wave device. Proceedings of the IEEE Ultrasonics Symposium. editor / S.C. Schneider ; M. Levy ; B.R. McAvoy. Vol. 1 IEEE, 1997. pp. 423-426
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