Multi-channel SAW chemical sensor is first used to analytical system for organic gas detection. SAW sensors are easy to show a high frequency property, and can become multi-channel devices on a substrate. The features improve a sensor sensitivity and enables integration of sensor. In this paper, we propose a new chemical sensor system using multi-channel SAW devices. A four channel SAW delay line was designed and fabricated on one piezoelectric substrate. Each channel was coated by a different selective organic film and the output of the each channel was used to make a response pattern. The each response to odorant solvents showed the different analyte specific patterns.
|Number of pages||4|
|Journal||Proceedings of the IEEE Ultrasonics Symposium|
|Publication status||Published - 1997 Dec 1|
|Event||Proceedings of the 1997 IEEE Ultrasonics Symposium. Part 1 (of 2) - Toronto, Can|
Duration: 1997 Oct 5 → 1997 Oct 8
ASJC Scopus subject areas
- Acoustics and Ultrasonics