Multi-directional Micro Switching Value Chip with Rotary Mechanism

Tadahiro Hasegawa, Kenichiro Nakashima, Fumiyuki Omatsu, Koji Ikuta

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)390-398
JournalSensors & Actuators: A. Physical
Volume143
Publication statusPublished - 2008 Jan 1

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