Original language | English |
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Pages (from-to) | 390-398 |
Journal | Sensors & Actuators: A. Physical |
Volume | 143 |
Publication status | Published - 2008 Jan 1 |
Multi-directional Micro Switching Value Chip with Rotary Mechanism
Tadahiro Hasegawa, Kenichiro Nakashima, Fumiyuki Omatsu, Koji Ikuta
Research output: Contribution to journal › Article › peer-review