Multi-directional micro-switching valve chip with rotary mechanism

Tadahiro Hasegawa, Kenichiro Nakashima, Fumiyuki Omatsu, Koji Ikuta

Research output: Contribution to journalArticle

32 Citations (Scopus)

Abstract

This paper describes the development of the world's first multi-directional micro-switching valve chip with 10 outlets. Designed for air-pressure driven micro-dispenser systems, this switching valve chip has a special rotary mechanism with a silicone rubber ring to prevent leaks and a precise auto-positioning mechanism. The design of the switching valve was optimized to enable a micro-solenoid (1 N, 6 V DC) to be built into the chip, allowing this chip to quickly switch among 10 outlets under high pressure (higher than 500 kPa). The switching valve chip was fabricated using our original method of hybrid microstereolithography (hybrid-IH process), thereby eliminating the need for microassembly and bonding.

Original languageEnglish
Pages (from-to)390-398
Number of pages9
JournalSensors and Actuators, A: Physical
Volume143
Issue number2
DOIs
Publication statusPublished - 2008 May 16
Externally publishedYes

Fingerprint

chips
Dispensers
Silicone Elastomers
outlets
Switching systems
Solenoids
Silicones
Rubber
dispensers
silicone rubber
Switches
solenoids
positioning
Air
switches
direct current
rings
air

Keywords

  • μ-TAS
  • Biochemical IC family
  • Multi-directional micro-switching valve
  • Optimal design
  • Pneumatic micro-dispenser system
  • Rotary mechanism

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Instrumentation

Cite this

Multi-directional micro-switching valve chip with rotary mechanism. / Hasegawa, Tadahiro; Nakashima, Kenichiro; Omatsu, Fumiyuki; Ikuta, Koji.

In: Sensors and Actuators, A: Physical, Vol. 143, No. 2, 16.05.2008, p. 390-398.

Research output: Contribution to journalArticle

Hasegawa, Tadahiro ; Nakashima, Kenichiro ; Omatsu, Fumiyuki ; Ikuta, Koji. / Multi-directional micro-switching valve chip with rotary mechanism. In: Sensors and Actuators, A: Physical. 2008 ; Vol. 143, No. 2. pp. 390-398.
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