Multi-directional micro-switching valve chip with rotary mechanism

Tadahiro Hasegawa, Kenichiro Nakashima, Fumiyuki Omatsu, Koji Ikuta

Research output: Contribution to journalArticlepeer-review

35 Citations (Scopus)


This paper describes the development of the world's first multi-directional micro-switching valve chip with 10 outlets. Designed for air-pressure driven micro-dispenser systems, this switching valve chip has a special rotary mechanism with a silicone rubber ring to prevent leaks and a precise auto-positioning mechanism. The design of the switching valve was optimized to enable a micro-solenoid (1 N, 6 V DC) to be built into the chip, allowing this chip to quickly switch among 10 outlets under high pressure (higher than 500 kPa). The switching valve chip was fabricated using our original method of hybrid microstereolithography (hybrid-IH process), thereby eliminating the need for microassembly and bonding.

Original languageEnglish
Pages (from-to)390-398
Number of pages9
JournalSensors and Actuators, A: Physical
Issue number2
Publication statusPublished - 2008 May 16
Externally publishedYes


  • Biochemical IC family
  • Multi-directional micro-switching valve
  • Optimal design
  • Pneumatic micro-dispenser system
  • Rotary mechanism
  • μ-TAS

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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