Multi-directional micro-switching valve chip with rotary mechanism

Tadahiro Hasegawa; Kenichiro Nakashima; Fumiyuki Omatsu; Koji Ikuta

doi:10.1016/j.sna.2007.10.082

Multi-directional micro-switching valve chip with rotary mechanism

Tadahiro Hasegawa, Kenichiro Nakashima, Fumiyuki Omatsu, Koji Ikuta

Research output: Contribution to journal › Article › peer-review

35 Citations (Scopus)

Abstract

This paper describes the development of the world's first multi-directional micro-switching valve chip with 10 outlets. Designed for air-pressure driven micro-dispenser systems, this switching valve chip has a special rotary mechanism with a silicone rubber ring to prevent leaks and a precise auto-positioning mechanism. The design of the switching valve was optimized to enable a micro-solenoid (1 N, 6 V DC) to be built into the chip, allowing this chip to quickly switch among 10 outlets under high pressure (higher than 500 kPa). The switching valve chip was fabricated using our original method of hybrid microstereolithography (hybrid-IH process), thereby eliminating the need for microassembly and bonding.

Original language	English
Pages (from-to)	390-398
Number of pages	9
Journal	Sensors and Actuators, A: Physical
Volume	143
Issue number	2
DOIs	https://doi.org/10.1016/j.sna.2007.10.082
Publication status	Published - 2008 May 16
Externally published	Yes

Keywords

Biochemical IC family
Multi-directional micro-switching valve
Optimal design
Pneumatic micro-dispenser system
Rotary mechanism
μ-TAS

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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10.1016/j.sna.2007.10.082

Cite this

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abstract = "This paper describes the development of the world's first multi-directional micro-switching valve chip with 10 outlets. Designed for air-pressure driven micro-dispenser systems, this switching valve chip has a special rotary mechanism with a silicone rubber ring to prevent leaks and a precise auto-positioning mechanism. The design of the switching valve was optimized to enable a micro-solenoid (1 N, 6 V DC) to be built into the chip, allowing this chip to quickly switch among 10 outlets under high pressure (higher than 500 kPa). The switching valve chip was fabricated using our original method of hybrid microstereolithography (hybrid-IH process), thereby eliminating the need for microassembly and bonding.",

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AU - Omatsu, Fumiyuki

AU - Ikuta, Koji

PY - 2008/5/16

Y1 - 2008/5/16

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AB - This paper describes the development of the world's first multi-directional micro-switching valve chip with 10 outlets. Designed for air-pressure driven micro-dispenser systems, this switching valve chip has a special rotary mechanism with a silicone rubber ring to prevent leaks and a precise auto-positioning mechanism. The design of the switching valve was optimized to enable a micro-solenoid (1 N, 6 V DC) to be built into the chip, allowing this chip to quickly switch among 10 outlets under high pressure (higher than 500 kPa). The switching valve chip was fabricated using our original method of hybrid microstereolithography (hybrid-IH process), thereby eliminating the need for microassembly and bonding.

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Multi-directional micro-switching valve chip with rotary mechanism

Abstract

Keywords

ASJC Scopus subject areas

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