Multi-directional switching valve chip with the rotary mechanism (1st report, verification of multiple-directional switching principle using the rotary mechanism)

Tadahiro Hasegawa; Kenichiro Nakashima; Koji Ikuta

doi:10.1299/kikaic.73.811

Multi-directional switching valve chip with the rotary mechanism (1st report, verification of multiple-directional switching principle using the rotary mechanism)

Tadahiro Hasegawa, Kenichiro Nakashima, Koji Ikuta

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

The world's first 10-way micro switching valve chip as one of Biochemical IC chip was developed successfully. This switching valve chip has a special rotary mechanism with the silicon rubber leak-preventions and the precise auto-positioning mechanism. This chip succeeded to switch ten outlets from one inlet without dead volume under high leakage pressure (>700 kPa). Since the micro fabrication was made by our original "hybrid microstereolithography" (hybrid-IH process), the micro assembling and bonding are not needed. This chip is generally useful for various kinds of micro chemical devices.

Original language	English
Pages (from-to)	811-816
Number of pages	6
Journal	Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
Volume	73
Issue number	3
DOIs	https://doi.org/10.1299/kikaic.73.811
Publication status	Published - 2007 Mar
Externally published	Yes

Keywords

Biochemical IC
Hybrid-IH process
Micro-TAS
Multi-directional switching valve
Rotary mechanism

ASJC Scopus subject areas

Mechanics of Materials
Mechanical Engineering
Industrial and Manufacturing Engineering

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10.1299/kikaic.73.811

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Multi-directional switching valve chip with the rotary mechanism (1st report, verification of multiple-directional switching principle using the rotary mechanism). / Hasegawa, Tadahiro; Nakashima, Kenichiro; Ikuta, Koji.

In: Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C, Vol. 73, No. 3, 03.2007, p. 811-816.

Research output: Contribution to journal › Article › peer-review

Hasegawa, T, Nakashima, K & Ikuta, K 2007, 'Multi-directional switching valve chip with the rotary mechanism (1st report, verification of multiple-directional switching principle using the rotary mechanism)', Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C, vol. 73, no. 3, pp. 811-816. https://doi.org/10.1299/kikaic.73.811

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Multi-directional switching valve chip with the rotary mechanism (1st report, verification of multiple-directional switching principle using the rotary mechanism)

Abstract

Keywords

ASJC Scopus subject areas

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