Abstract
The world's first 10-way micro switching valve chip as one of Biochemical IC chip was developed successfully. This switching valve chip has a special rotary mechanism with the silicon rubber leak-preventions and the precise auto-positioning mechanism. This chip succeeded to switch ten outlets from one inlet without dead volume under high leakage pressure (>700 kPa). Since the micro fabrication was made by our original "hybrid microstereolithography" (hybrid-IH process), the micro assembling and bonding are not needed. This chip is generally useful for various kinds of micro chemical devices.
| Original language | English |
|---|---|
| Pages (from-to) | 811-816 |
| Number of pages | 6 |
| Journal | Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C |
| Volume | 73 |
| Issue number | 3 |
| Publication status | Published - 2007 Mar |
| Externally published | Yes |
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Keywords
- Biochemical IC
- Hybrid-IH process
- Micro-TAS
- Multi-directional switching valve
- Rotary mechanism
ASJC Scopus subject areas
- Mechanical Engineering
Cite this
Multi-directional switching valve chip with the rotary mechanism (1st report, verification of multiple-directional switching principle using the rotary mechanism). / Hasegawa, Tadahiro; Nakashima, Kenichiro; Ikuta, Koji.
In: Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C, Vol. 73, No. 3, 03.2007, p. 811-816.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Multi-directional switching valve chip with the rotary mechanism (1st report, verification of multiple-directional switching principle using the rotary mechanism)
AU - Hasegawa, Tadahiro
AU - Nakashima, Kenichiro
AU - Ikuta, Koji
PY - 2007/3
Y1 - 2007/3
N2 - The world's first 10-way micro switching valve chip as one of Biochemical IC chip was developed successfully. This switching valve chip has a special rotary mechanism with the silicon rubber leak-preventions and the precise auto-positioning mechanism. This chip succeeded to switch ten outlets from one inlet without dead volume under high leakage pressure (>700 kPa). Since the micro fabrication was made by our original "hybrid microstereolithography" (hybrid-IH process), the micro assembling and bonding are not needed. This chip is generally useful for various kinds of micro chemical devices.
AB - The world's first 10-way micro switching valve chip as one of Biochemical IC chip was developed successfully. This switching valve chip has a special rotary mechanism with the silicon rubber leak-preventions and the precise auto-positioning mechanism. This chip succeeded to switch ten outlets from one inlet without dead volume under high leakage pressure (>700 kPa). Since the micro fabrication was made by our original "hybrid microstereolithography" (hybrid-IH process), the micro assembling and bonding are not needed. This chip is generally useful for various kinds of micro chemical devices.
KW - Biochemical IC
KW - Hybrid-IH process
KW - Micro-TAS
KW - Multi-directional switching valve
KW - Rotary mechanism
UR - http://www.scopus.com/inward/record.url?scp=34250198690&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=34250198690&partnerID=8YFLogxK
M3 - Article
VL - 73
SP - 811
EP - 816
JO - Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
JF - Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
SN - 0387-5024
IS - 3
ER -