Abstract
The world's first 10-way micro switching valve chip as one of Biochemical IC chip was developed successfully. This switching valve chip has a special rotary mechanism with the silicon rubber leak-preventions and the precise auto-positioning mechanism. This chip succeeded to switch ten outlets from one inlet without dead volume under high leakage pressure (>700 kPa). Since the micro fabrication was made by our original "hybrid microstereolithography" (hybrid-IH process), the micro assembling and bonding are not needed. This chip is generally useful for various kinds of micro chemical devices.
| Original language | English |
|---|---|
| Pages (from-to) | 811-816 |
| Number of pages | 6 |
| Journal | Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C |
| Volume | 73 |
| Issue number | 3 |
| Publication status | Published - 2007 Mar 1 |
Keywords
- Biochemical IC
- Hybrid-IH process
- Micro-TAS
- Multi-directional switching valve
- Rotary mechanism
ASJC Scopus subject areas
- Mechanics of Materials
- Mechanical Engineering
- Industrial and Manufacturing Engineering
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Hasegawa, T., Nakashima, K., & Ikuta, K. (2007). Multi-directional switching valve chip with the rotary mechanism (1st report, verification of multiple-directional switching principle using the rotary mechanism). Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C, 73(3), 811-816.