Multi-directional switching valve chip with the rotary mechanism (1st report, verification of multiple-directional switching principle using the rotary mechanism)

Tadahiro Hasegawa, Kenichiro Nakashima, Koji Ikuta

Research output: Contribution to journalArticle

2 Citations (Scopus)


The world's first 10-way micro switching valve chip as one of Biochemical IC chip was developed successfully. This switching valve chip has a special rotary mechanism with the silicon rubber leak-preventions and the precise auto-positioning mechanism. This chip succeeded to switch ten outlets from one inlet without dead volume under high leakage pressure (>700 kPa). Since the micro fabrication was made by our original "hybrid microstereolithography" (hybrid-IH process), the micro assembling and bonding are not needed. This chip is generally useful for various kinds of micro chemical devices.

Original languageEnglish
Pages (from-to)811-816
Number of pages6
JournalNihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
Issue number3
Publication statusPublished - 2007 Mar 1



  • Biochemical IC
  • Hybrid-IH process
  • Micro-TAS
  • Multi-directional switching valve
  • Rotary mechanism

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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