Multi-directional switching valve chip with the rotary mechanism (1st report, verification of multiple-directional switching principle using the rotary mechanism)

Tadahiro Hasegawa, Kenichiro Nakashima, Koji Ikuta

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

The world's first 10-way micro switching valve chip as one of Biochemical IC chip was developed successfully. This switching valve chip has a special rotary mechanism with the silicon rubber leak-preventions and the precise auto-positioning mechanism. This chip succeeded to switch ten outlets from one inlet without dead volume under high leakage pressure (>700 kPa). Since the micro fabrication was made by our original "hybrid microstereolithography" (hybrid-IH process), the micro assembling and bonding are not needed. This chip is generally useful for various kinds of micro chemical devices.

Original languageEnglish
Pages (from-to)811-816
Number of pages6
JournalNihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
Volume73
Issue number3
Publication statusPublished - 2007 Mar
Externally publishedYes

Fingerprint

Microfabrication
Rubber
Switches
Silicon

Keywords

  • Biochemical IC
  • Hybrid-IH process
  • Micro-TAS
  • Multi-directional switching valve
  • Rotary mechanism

ASJC Scopus subject areas

  • Mechanical Engineering

Cite this

@article{1be203ecded74871847b4858c33ee270,
title = "Multi-directional switching valve chip with the rotary mechanism (1st report, verification of multiple-directional switching principle using the rotary mechanism)",
abstract = "The world's first 10-way micro switching valve chip as one of Biochemical IC chip was developed successfully. This switching valve chip has a special rotary mechanism with the silicon rubber leak-preventions and the precise auto-positioning mechanism. This chip succeeded to switch ten outlets from one inlet without dead volume under high leakage pressure (>700 kPa). Since the micro fabrication was made by our original {"}hybrid microstereolithography{"} (hybrid-IH process), the micro assembling and bonding are not needed. This chip is generally useful for various kinds of micro chemical devices.",
keywords = "Biochemical IC, Hybrid-IH process, Micro-TAS, Multi-directional switching valve, Rotary mechanism",
author = "Tadahiro Hasegawa and Kenichiro Nakashima and Koji Ikuta",
year = "2007",
month = "3",
language = "English",
volume = "73",
pages = "811--816",
journal = "Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C",
issn = "0387-5024",
publisher = "Japan Society of Mechanical Engineers",
number = "3",

}

TY - JOUR

T1 - Multi-directional switching valve chip with the rotary mechanism (1st report, verification of multiple-directional switching principle using the rotary mechanism)

AU - Hasegawa, Tadahiro

AU - Nakashima, Kenichiro

AU - Ikuta, Koji

PY - 2007/3

Y1 - 2007/3

N2 - The world's first 10-way micro switching valve chip as one of Biochemical IC chip was developed successfully. This switching valve chip has a special rotary mechanism with the silicon rubber leak-preventions and the precise auto-positioning mechanism. This chip succeeded to switch ten outlets from one inlet without dead volume under high leakage pressure (>700 kPa). Since the micro fabrication was made by our original "hybrid microstereolithography" (hybrid-IH process), the micro assembling and bonding are not needed. This chip is generally useful for various kinds of micro chemical devices.

AB - The world's first 10-way micro switching valve chip as one of Biochemical IC chip was developed successfully. This switching valve chip has a special rotary mechanism with the silicon rubber leak-preventions and the precise auto-positioning mechanism. This chip succeeded to switch ten outlets from one inlet without dead volume under high leakage pressure (>700 kPa). Since the micro fabrication was made by our original "hybrid microstereolithography" (hybrid-IH process), the micro assembling and bonding are not needed. This chip is generally useful for various kinds of micro chemical devices.

KW - Biochemical IC

KW - Hybrid-IH process

KW - Micro-TAS

KW - Multi-directional switching valve

KW - Rotary mechanism

UR - http://www.scopus.com/inward/record.url?scp=34250198690&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34250198690&partnerID=8YFLogxK

M3 - Article

VL - 73

SP - 811

EP - 816

JO - Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C

JF - Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C

SN - 0387-5024

IS - 3

ER -