Abstract
The world's first 10-way micro switching valve chip as one of Biochemical IC chip was developed successfully. This switching valve chip has a special rotary mechanism with the silicon rubber leak-preventions and the precise auto-positioning mechanism. This chip succeeded to switch ten outlets from one inlet without dead volume under high leakage pressure (>700 kPa). Since the micro fabrication was made by our original "hybrid microstereolithography" (hybrid-IH process), the micro assembling and bonding are not needed. This chip is generally useful for various kinds of micro chemical devices.
Original language | English |
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Pages (from-to) | 811-816 |
Number of pages | 6 |
Journal | Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C |
Volume | 73 |
Issue number | 3 |
DOIs | |
Publication status | Published - 2007 Mar |
Externally published | Yes |
Keywords
- Biochemical IC
- Hybrid-IH process
- Micro-TAS
- Multi-directional switching valve
- Rotary mechanism
ASJC Scopus subject areas
- Mechanics of Materials
- Mechanical Engineering
- Industrial and Manufacturing Engineering