Multi-Micro Pump Chip to Flow Gases and Liquids

K.Ikuta K.Ikuta, T. Adachi, T. Hasegawa

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)233-235
JournalThe Fifth International Symposium on Micro Total Analysis Systems
Publication statusPublished - 2001 Oct 1

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