Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses

Toshiaki Kondo, Shigeki Matsuo, Saulius Juodkazis, Vygantas Mizeikis, Hiroaki Misawa

Research output: Contribution to journalArticle

167 Citations (Scopus)

Abstract

The fabrication of two-dimensional periodic structures by means of multibeam interference of femtosecond pulses was reported. The multiphoton nature of the fabrication process was confirmed. It was found that the fabricated rods arranged into a square lattice have high quality and high aspect ratios.

Original languageEnglish
Pages (from-to)2758-2760
Number of pages3
JournalApplied Physics Letters
Volume82
Issue number17
DOIs
Publication statusPublished - 2003 Apr 28

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ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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