Nano-dot and nano-rod formation in electron beam induced deposition using iron carbonyl

M. Shimojo, W. Zhang, M. Takeguchi, M. Tanaka, K. Mitsuishi, K. Furuya

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)
Original languageEnglish
Pages (from-to)5651-5653
JournalJpn. J. Appl. Phys
Volume44
Publication statusPublished - 2005 Jan 1

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