Nano-dot and nano-rod formation in electron beam induced deposition using iron carbonyl

M. Shimojo, W. Zhang, M. Takeguchi, M. Tanaka, K. Mitsuishi, K. Furuya

Research output: Contribution to journalArticle

7 Citations (Scopus)
Original languageEnglish
Pages (from-to)5651-5653
JournalJpn. J. Appl. Phys
Volume44
Publication statusPublished - 2005 Jan 1

Cite this

Shimojo, M., Zhang, W., Takeguchi, M., Tanaka, M., Mitsuishi, K., & Furuya, K. (2005). Nano-dot and nano-rod formation in electron beam induced deposition using iron carbonyl. Jpn. J. Appl. Phys, 44, 5651-5653.

Nano-dot and nano-rod formation in electron beam induced deposition using iron carbonyl. / Shimojo, M.; Zhang, W.; Takeguchi, M.; Tanaka, M.; Mitsuishi, K.; Furuya, K.

In: Jpn. J. Appl. Phys, Vol. 44, 01.01.2005, p. 5651-5653.

Research output: Contribution to journalArticle

Shimojo, M, Zhang, W, Takeguchi, M, Tanaka, M, Mitsuishi, K & Furuya, K 2005, 'Nano-dot and nano-rod formation in electron beam induced deposition using iron carbonyl', Jpn. J. Appl. Phys, vol. 44, pp. 5651-5653.
Shimojo M, Zhang W, Takeguchi M, Tanaka M, Mitsuishi K, Furuya K. Nano-dot and nano-rod formation in electron beam induced deposition using iron carbonyl. Jpn. J. Appl. Phys. 2005 Jan 1;44:5651-5653.
Shimojo, M. ; Zhang, W. ; Takeguchi, M. ; Tanaka, M. ; Mitsuishi, K. ; Furuya, K. / Nano-dot and nano-rod formation in electron beam induced deposition using iron carbonyl. In: Jpn. J. Appl. Phys. 2005 ; Vol. 44. pp. 5651-5653.
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