Nano-dot and nano-rod formation in electron beam induced deposition using iron carbonyl

M. Shimojo, W. Zhang, M. Takeguchi, M. Tanaka, K. Mitsuishi, K. Furuya

Research output: Contribution to journalArticle

8 Citations (Scopus)
Original languageEnglish
Pages (from-to)5651-5653
JournalJpn. J. Appl. Phys
Volume44
Publication statusPublished - 2005 Jan 1

Cite this

Shimojo, M., Zhang, W., Takeguchi, M., Tanaka, M., Mitsuishi, K., & Furuya, K. (2005). Nano-dot and nano-rod formation in electron beam induced deposition using iron carbonyl. Jpn. J. Appl. Phys, 44, 5651-5653.