Nano-fabrication combining electron-beam-induced deposition and low energy ion beam

K. Mitsuishi, M. Shimojo, M. Tanaka, K. Furuya

Research output: Contribution to journalArticle

6 Citations (Scopus)
Original languageEnglish
Pages (from-to)244-246
JournalNucl. Instrum. Meth. B
Volume242
Publication statusPublished - 2006 Jan 1

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