Nano-fabrication combining electron-beam-induced deposition and low energy ion beam

K. Mitsuishi, M. Shimojo, M. Tanaka, K. Furuya

Research output: Contribution to journal › Article › peer-review

Cite this

@article{8a9d45e83e9d4e8ab6c42eefc672ef89,

title = "Nano-fabrication combining electron-beam-induced deposition and low energy ion beam",

author = "K. Mitsuishi and M. Shimojo and M. Tanaka and K. Furuya",

year = "2006",

month = jan,

day = "1",

language = "English",

volume = "242",

pages = "244--246",

journal = "Nucl. Instrum. Meth. B",

}