Nano-fabrication technique using electron-beam-induced deposition with low energy ion milling

K. Mitsuishi, M. Shimojo, M. Tanaka, M. Takeguchi, K. Furuya

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)29-34
JournalDefault journal
Publication statusPublished - 2005 Mar 1

Cite this

Nano-fabrication technique using electron-beam-induced deposition with low energy ion milling. / Mitsuishi, K.; Shimojo, M.; Tanaka, M.; Takeguchi, M.; Furuya, K.

In: Default journal, 01.03.2005, p. 29-34.

Research output: Contribution to journalArticle

Mitsuishi, K. ; Shimojo, M. ; Tanaka, M. ; Takeguchi, M. ; Furuya, K. / Nano-fabrication technique using electron-beam-induced deposition with low energy ion milling. In: Default journal. 2005 ; pp. 29-34.
@article{8855416c494549e594f6aee23570b58e,
title = "Nano-fabrication technique using electron-beam-induced deposition with low energy ion milling",
author = "K. Mitsuishi and M. Shimojo and M. Tanaka and M. Takeguchi and K. Furuya",
year = "2005",
month = "3",
day = "1",
language = "English",
pages = "29--34",
journal = "Default journal",

}

TY - JOUR

T1 - Nano-fabrication technique using electron-beam-induced deposition with low energy ion milling

AU - Mitsuishi, K.

AU - Shimojo, M.

AU - Tanaka, M.

AU - Takeguchi, M.

AU - Furuya, K.

PY - 2005/3/1

Y1 - 2005/3/1

M3 - Article

SP - 29

EP - 34

JO - Default journal

JF - Default journal

ER -