Nano-fabrication technique using electron-beam-induced deposition with low energy ion milling

K. Mitsuishi, M. Shimojo, M. Tanaka, M. Takeguchi, K. Furuya

Research output: Contribution to journal › Article › peer-review

Cite this

@article{8855416c494549e594f6aee23570b58e,

title = "Nano-fabrication technique using electron-beam-induced deposition with low energy ion milling",

author = "K. Mitsuishi and M. Shimojo and M. Tanaka and M. Takeguchi and K. Furuya",

year = "2005",

month = mar,

day = "1",

language = "English",

pages = "29--34",

journal = "Default journal",

}