Nano-fabrication technique using electron-beam-induced deposition with low energy ion milling

K. Mitsuishi, M. Shimojo, M. Tanaka, M. Takeguchi, K. Furuya

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)29-34
JournalDefault journal
Publication statusPublished - 2005 Mar 1

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