Nano-fabrication using a sub-nanometer-sized probe of high energy electrons

K. Mitsuishi, M. Shimojo, M. Takeguchi, M. Tanaka, M. Song, K. Furuya

Research output: Contribution to journalArticle

117 Citations (Scopus)
Original languageEnglish
Pages (from-to)2064-2066
JournalAppl. Phys. Lett.
Volume83
Publication statusPublished - 2003 Jan 1

Cite this

Mitsuishi, K., Shimojo, M., Takeguchi, M., Tanaka, M., Song, M., & Furuya, K. (2003). Nano-fabrication using a sub-nanometer-sized probe of high energy electrons. Appl. Phys. Lett., 83, 2064-2066.

Nano-fabrication using a sub-nanometer-sized probe of high energy electrons. / Mitsuishi, K.; Shimojo, M.; Takeguchi, M.; Tanaka, M.; Song, M.; Furuya, K.

In: Appl. Phys. Lett., Vol. 83, 01.01.2003, p. 2064-2066.

Research output: Contribution to journalArticle

Mitsuishi, K, Shimojo, M, Takeguchi, M, Tanaka, M, Song, M & Furuya, K 2003, 'Nano-fabrication using a sub-nanometer-sized probe of high energy electrons', Appl. Phys. Lett., vol. 83, pp. 2064-2066.
Mitsuishi K, Shimojo M, Takeguchi M, Tanaka M, Song M, Furuya K. Nano-fabrication using a sub-nanometer-sized probe of high energy electrons. Appl. Phys. Lett. 2003 Jan 1;83:2064-2066.
Mitsuishi, K. ; Shimojo, M. ; Takeguchi, M. ; Tanaka, M. ; Song, M. ; Furuya, K. / Nano-fabrication using a sub-nanometer-sized probe of high energy electrons. In: Appl. Phys. Lett. 2003 ; Vol. 83. pp. 2064-2066.
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