Nano-fabrication using a sub-nanometer-sized probe of high energy electrons

K. Mitsuishi, M. Shimojo, M. Takeguchi, M. Tanaka, M. Song, K. Furuya

Research output: Contribution to journalArticlepeer-review

118 Citations (Scopus)
Original languageEnglish
Pages (from-to)2064-2066
JournalAppl. Phys. Lett.
Volume83
Publication statusPublished - 2003 Jan 1

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