Nano-fabrication using a sub-nanometer-sized probe of high energy electrons

K. Mitsuishi, M. Shimojo, M. Takeguchi, M. Tanaka, M. Song, K. Furuya

Research output: Contribution to journalArticle

118 Citations (Scopus)
Original languageEnglish
Pages (from-to)2064-2066
JournalAppl. Phys. Lett.
Volume83
Publication statusPublished - 2003 Jan 1

Cite this

Mitsuishi, K., Shimojo, M., Takeguchi, M., Tanaka, M., Song, M., & Furuya, K. (2003). Nano-fabrication using a sub-nanometer-sized probe of high energy electrons. Appl. Phys. Lett., 83, 2064-2066.