Original language | English |
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Pages (from-to) | 305-308 |
Journal | Transactions of the Materials Research Society of Japan |
Volume | 36 |
Publication status | Published - 2011 Sep 1 |
Cite this
Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species. / Takano, Katsuyoshi; Satoh, Takahiro; Ishii, Yasuyuki; Koka, Masashi; Kamiya, Tomihiro; Ohkubo, Takeru; Sugimoto, Masaki; Nishikawa, Hiroyuki; Seki, Shu.
In: Transactions of the Materials Research Society of Japan, Vol. 36, 01.09.2011, p. 305-308.Research output: Contribution to journal › Article
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TY - JOUR
T1 - Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species
AU - Takano, Katsuyoshi
AU - Satoh, Takahiro
AU - Ishii, Yasuyuki
AU - Koka, Masashi
AU - Kamiya, Tomihiro
AU - Ohkubo, Takeru
AU - Sugimoto, Masaki
AU - Nishikawa, Hiroyuki
AU - Seki, Shu
PY - 2011/9/1
Y1 - 2011/9/1
M3 - Article
VL - 36
SP - 305
EP - 308
JO - Transactions of the Materials Research Society of Japan
JF - Transactions of the Materials Research Society of Japan
ER -