Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species

Katsuyoshi Takano; Takahiro Satoh; Yasuyuki Ishii; Masashi Koka; Tomihiro Kamiya; Takeru Ohkubo; Masaki Sugimoto; Hiroyuki Nishikawa; Shu Seki

Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species

Katsuyoshi Takano, Takahiro Satoh, Yasuyuki Ishii, Masashi Koka, Tomihiro Kamiya, Takeru Ohkubo, Masaki Sugimoto, Hiroyuki Nishikawa, Shu Seki

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	305-308
Journal	Transactions of the Materials Research Society of Japan
Volume	36
Publication status	Published - 2011 Sep 1

Cite this

Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species. / Takano, Katsuyoshi; Satoh, Takahiro; Ishii, Yasuyuki; Koka, Masashi; Kamiya, Tomihiro; Ohkubo, Takeru; Sugimoto, Masaki; Nishikawa, Hiroyuki; Seki, Shu.

In: Transactions of the Materials Research Society of Japan, Vol. 36, 01.09.2011, p. 305-308.

Research output: Contribution to journal › Article › peer-review

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AU - Koka, Masashi

AU - Kamiya, Tomihiro

AU - Ohkubo, Takeru

AU - Sugimoto, Masaki

AU - Nishikawa, Hiroyuki

AU - Seki, Shu

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JF - Transactions of the Materials Research Society of Japan

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