Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species

Katsuyoshi Takano, Takahiro Satoh, Yasuyuki Ishii, Masashi Koka, Tomihiro Kamiya, Takeru Ohkubo, Masaki Sugimoto, Hiroyuki Nishikawa, Shu Seki

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)305-308
JournalTransactions of the Materials Research Society of Japan
Volume36
Publication statusPublished - 2011 Sep 1

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