Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species

Katsuyoshi Takano; Takahiro Satoh; Yasuyuki Ishii; Masashi Koka; Tomihiro Kamiya; Takeru Ohkubo; Masaki Sugimoto; Hiroyuki Nishikawa; Shu Seki

Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species

Katsuyoshi Takano, Takahiro Satoh, Yasuyuki Ishii, Masashi Koka, Tomihiro Kamiya, Takeru Ohkubo, Masaki Sugimoto, Hiroyuki Nishikawa, Shu Seki

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	305-308
Journal	Transactions of the Materials Research Society of Japan
Volume	36
Publication status	Published - 2011 Sep 1

Cite this

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title = "Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species",

author = "Katsuyoshi Takano and Takahiro Satoh and Yasuyuki Ishii and Masashi Koka and Tomihiro Kamiya and Takeru Ohkubo and Masaki Sugimoto and Hiroyuki Nishikawa and Shu Seki",

year = "2011",

month = sep,

day = "1",

language = "English",

volume = "36",

pages = "305--308",

journal = "Transactions of the Materials Research Society of Japan",

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TY - JOUR

T1 - Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species

AU - Takano, Katsuyoshi

AU - Satoh, Takahiro

AU - Ishii, Yasuyuki

AU - Koka, Masashi

AU - Kamiya, Tomihiro

AU - Ohkubo, Takeru

AU - Sugimoto, Masaki

AU - Nishikawa, Hiroyuki

AU - Seki, Shu

PY - 2011/9/1

Y1 - 2011/9/1

M3 - Article

VL - 36

SP - 305

EP - 308

JO - Transactions of the Materials Research Society of Japan

JF - Transactions of the Materials Research Society of Japan

ER -