Original language | English |
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Pages (from-to) | 305-308 |
Journal | Transactions of the Materials Research Society of Japan |
Volume | 36 |
Publication status | Published - 2011 Sept 1 |
Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species
Katsuyoshi Takano, Takahiro Satoh, Yasuyuki Ishii, Masashi Koka, Tomihiro Kamiya, Takeru Ohkubo, Masaki Sugimoto, Hiroyuki Nishikawa, Shu Seki
Research output: Contribution to journal › Article › peer-review