Nanodot and nanorod formation in electron-beam-induced deposition using iron carbonyl

Masayuki Shimojo, Wei Zhang, Masaki Takeguchi, Miyoko Tanaka, Kazutaka Mitsuishi, Kazuo Furuya

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Electron-beam-induced deposition is a promising technique for producing position-controlled nanometer-sized structures without using masks. In this study, electron-beam-induced deposition was carried out using iron carbonyl, and nanometer-sized dots and freestanding rods were fabricated. The nanostructures were characterized by scanning and transmission electron microscopy. The size of the nanodots as a function of beam irradiation time, and the width of the freestanding rods as a function of beam scan speed are reported. Nanocrystal formation under an area scan is also reported.

Original languageEnglish
Pages (from-to)5651-5653
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume44
Issue number7 B
DOIs
Publication statusPublished - 2005 Jul 26

Keywords

  • Electron-beam-induced deposition
  • Iron carbide
  • Iron pentacarbonyl
  • Nanofabrication
  • Scan speed

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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