Nanodot and nanorod formation in electron-beam-induced deposition using iron carbonyl

Masayuki Shimojo, Wei Zhang, Masaki Takeguchi, Miyoko Tanaka, Kazutaka Mitsuishi, Kazuo Furuya

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Electron-beam-induced deposition is a promising technique for producing position-controlled nanometer-sized structures without using masks. In this study, electron-beam-induced deposition was carried out using iron carbonyl, and nanometer-sized dots and freestanding rods were fabricated. The nanostructures were characterized by scanning and transmission electron microscopy. The size of the nanodots as a function of beam irradiation time, and the width of the freestanding rods as a function of beam scan speed are reported. Nanocrystal formation under an area scan is also reported.

Original languageEnglish
Pages (from-to)5651-5653
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume44
Issue number7 B
DOIs
Publication statusPublished - 2005 Jul 26
Externally publishedYes

Fingerprint

Nanorods
nanorods
Electron beams
rods
electron beams
Iron
iron
Nanocrystals
Masks
Nanostructures
nanocrystals
masks
Irradiation
Transmission electron microscopy
transmission electron microscopy
Scanning electron microscopy
scanning electron microscopy
irradiation

Keywords

  • Electron-beam-induced deposition
  • Iron carbide
  • Iron pentacarbonyl
  • Nanofabrication
  • Scan speed

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Nanodot and nanorod formation in electron-beam-induced deposition using iron carbonyl. / Shimojo, Masayuki; Zhang, Wei; Takeguchi, Masaki; Tanaka, Miyoko; Mitsuishi, Kazutaka; Furuya, Kazuo.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 44, No. 7 B, 26.07.2005, p. 5651-5653.

Research output: Contribution to journalArticle

Shimojo, Masayuki ; Zhang, Wei ; Takeguchi, Masaki ; Tanaka, Miyoko ; Mitsuishi, Kazutaka ; Furuya, Kazuo. / Nanodot and nanorod formation in electron-beam-induced deposition using iron carbonyl. In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 2005 ; Vol. 44, No. 7 B. pp. 5651-5653.
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