Nanofabrication using electron-beam induced deposition combined with low energy ion milling

K. Mitsuishi, M. Shimojo, M. Tanaka, M. Takeguchi., K. Furuya

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)28
JournalDefault journal
Publication statusPublished - 2004 Nov 1

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