Nanofabrication using electron beam induced deposition technique

M. Shimojo, M. Shimojo;K.Mitsuishi;M.Takeguchi;M.Tanaka;K. Furuya

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)209-230
JournalEncyclopedia of Nanoscience and Nanotechnology
Volume17
Publication statusPublished - 2011 Dec 1

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