Nanofabrication using electron beam induced deposition technique

M. Shimojo, M. Shimojo;K.Mitsuishi;M.Takeguchi;M.Tanaka;K. Furuya

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)209-230
JournalEncyclopedia of Nanoscience and Nanotechnology
Volume17
Publication statusPublished - 2011 Dec 1

Cite this

Nanofabrication using electron beam induced deposition technique. / Shimojo, M.; Furuya, M. Shimojo;K.Mitsuishi;M.Takeguchi;M.Tanaka;K.

In: Encyclopedia of Nanoscience and Nanotechnology, Vol. 17, 01.12.2011, p. 209-230.

Research output: Contribution to journalArticle

Shimojo, M. ; Furuya, M. Shimojo;K.Mitsuishi;M.Takeguchi;M.Tanaka;K. / Nanofabrication using electron beam induced deposition technique. In: Encyclopedia of Nanoscience and Nanotechnology. 2011 ; Vol. 17. pp. 209-230.
@article{07ddaa579b574c1781c800127b2b7dd0,
title = "Nanofabrication using electron beam induced deposition technique",
author = "M. Shimojo and Furuya, {M. Shimojo;K.Mitsuishi;M.Takeguchi;M.Tanaka;K.}",
year = "2011",
month = "12",
day = "1",
language = "English",
volume = "17",
pages = "209--230",
journal = "Encyclopedia of Nanoscience and Nanotechnology",

}

TY - JOUR

T1 - Nanofabrication using electron beam induced deposition technique

AU - Shimojo, M.

AU - Furuya, M. Shimojo;K.Mitsuishi;M.Takeguchi;M.Tanaka;K.

PY - 2011/12/1

Y1 - 2011/12/1

M3 - Article

VL - 17

SP - 209

EP - 230

JO - Encyclopedia of Nanoscience and Nanotechnology

JF - Encyclopedia of Nanoscience and Nanotechnology

ER -