Nanoscale energy-filtered scanning confocal electron microscopy using a double-aberration-corrected transmission electron microscope

Peng Wang, Gavin Behan, Masaki Takeguchi, Ayako Hashimoto, Kazutaka Mitsuishi, Masayuki Shimojo, Angus I. Kirkland, Peter D. Nellist

Research output: Contribution to journalArticle

42 Citations (Scopus)

Abstract

We demonstrate that a transmission electron microscope fitted with two spherical-aberration correctors can be operated as an energy-filtered scanning confocal electron microscope. A method for establishing this mode is described and initial results showing 3D chemical mapping with nanoscale sensitivity to height and thickness changes in a carbon film are presented. Importantly, uncorrected chromatic aberration does not limit the depth resolution of this technique and moreover performs an energy-filtering role, which is explained in terms of a combined depth and energy-loss response function.

Original languageEnglish
Article number200801
JournalPhysical Review Letters
Volume104
Issue number20
DOIs
Publication statusPublished - 2010 May 20

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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