Nanoscale energy-filtered scanning confocal electron microscopy using a double-aberration-corrected transmission electron microscope

Peng Wang, Gavin Behan, Masaki Takeguchi, Ayako Hashimoto, Kazutaka Mitsuishi, Masayuki Shimojo, Angus I. Kirkland, Peter D. Nellist

Research output: Contribution to journalArticle

41 Citations (Scopus)

Abstract

We demonstrate that a transmission electron microscope fitted with two spherical-aberration correctors can be operated as an energy-filtered scanning confocal electron microscope. A method for establishing this mode is described and initial results showing 3D chemical mapping with nanoscale sensitivity to height and thickness changes in a carbon film are presented. Importantly, uncorrected chromatic aberration does not limit the depth resolution of this technique and moreover performs an energy-filtering role, which is explained in terms of a combined depth and energy-loss response function.

Original languageEnglish
Article number200801
JournalPhysical Review Letters
Volume104
Issue number20
DOIs
Publication statusPublished - 2010 May 20
Externally publishedYes

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aberration
electron microscopes
scanning electron microscopy
energy dissipation
scanning
energy
carbon
sensitivity

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Nanoscale energy-filtered scanning confocal electron microscopy using a double-aberration-corrected transmission electron microscope. / Wang, Peng; Behan, Gavin; Takeguchi, Masaki; Hashimoto, Ayako; Mitsuishi, Kazutaka; Shimojo, Masayuki; Kirkland, Angus I.; Nellist, Peter D.

In: Physical Review Letters, Vol. 104, No. 20, 200801, 20.05.2010.

Research output: Contribution to journalArticle

Wang, Peng ; Behan, Gavin ; Takeguchi, Masaki ; Hashimoto, Ayako ; Mitsuishi, Kazutaka ; Shimojo, Masayuki ; Kirkland, Angus I. ; Nellist, Peter D. / Nanoscale energy-filtered scanning confocal electron microscopy using a double-aberration-corrected transmission electron microscope. In: Physical Review Letters. 2010 ; Vol. 104, No. 20.
@article{0f6db669909c425095eead349b5309a3,
title = "Nanoscale energy-filtered scanning confocal electron microscopy using a double-aberration-corrected transmission electron microscope",
abstract = "We demonstrate that a transmission electron microscope fitted with two spherical-aberration correctors can be operated as an energy-filtered scanning confocal electron microscope. A method for establishing this mode is described and initial results showing 3D chemical mapping with nanoscale sensitivity to height and thickness changes in a carbon film are presented. Importantly, uncorrected chromatic aberration does not limit the depth resolution of this technique and moreover performs an energy-filtering role, which is explained in terms of a combined depth and energy-loss response function.",
author = "Peng Wang and Gavin Behan and Masaki Takeguchi and Ayako Hashimoto and Kazutaka Mitsuishi and Masayuki Shimojo and Kirkland, {Angus I.} and Nellist, {Peter D.}",
year = "2010",
month = "5",
day = "20",
doi = "10.1103/PhysRevLett.104.200801",
language = "English",
volume = "104",
journal = "Physical Review Letters",
issn = "0031-9007",
publisher = "American Physical Society",
number = "20",

}

TY - JOUR

T1 - Nanoscale energy-filtered scanning confocal electron microscopy using a double-aberration-corrected transmission electron microscope

AU - Wang, Peng

AU - Behan, Gavin

AU - Takeguchi, Masaki

AU - Hashimoto, Ayako

AU - Mitsuishi, Kazutaka

AU - Shimojo, Masayuki

AU - Kirkland, Angus I.

AU - Nellist, Peter D.

PY - 2010/5/20

Y1 - 2010/5/20

N2 - We demonstrate that a transmission electron microscope fitted with two spherical-aberration correctors can be operated as an energy-filtered scanning confocal electron microscope. A method for establishing this mode is described and initial results showing 3D chemical mapping with nanoscale sensitivity to height and thickness changes in a carbon film are presented. Importantly, uncorrected chromatic aberration does not limit the depth resolution of this technique and moreover performs an energy-filtering role, which is explained in terms of a combined depth and energy-loss response function.

AB - We demonstrate that a transmission electron microscope fitted with two spherical-aberration correctors can be operated as an energy-filtered scanning confocal electron microscope. A method for establishing this mode is described and initial results showing 3D chemical mapping with nanoscale sensitivity to height and thickness changes in a carbon film are presented. Importantly, uncorrected chromatic aberration does not limit the depth resolution of this technique and moreover performs an energy-filtering role, which is explained in terms of a combined depth and energy-loss response function.

UR - http://www.scopus.com/inward/record.url?scp=77953104571&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77953104571&partnerID=8YFLogxK

U2 - 10.1103/PhysRevLett.104.200801

DO - 10.1103/PhysRevLett.104.200801

M3 - Article

VL - 104

JO - Physical Review Letters

JF - Physical Review Letters

SN - 0031-9007

IS - 20

M1 - 200801

ER -