Nanostructure characterization of tungsten-containing nanorods deposited by electron-beam-induced chemical vapour decomposition

Ming Han, Kazutaka Mitsuishi, Masayuki Shimojo, Kazuo Furuya

Research output: Contribution to journalArticle

37 Citations (Scopus)

Abstract

Electron-beam-induced chemical vapour decomposition was performed in a scanning transmission electron microscope using a precursor of tungsten carbonyl (W(CO)6). The self-supporting nanorods were grown from the edges of a C film with widths that depend on the electron-beam scanning speed used in the fabrication process. The nanostructure of as-deposited nanorods has been characterized in detail using energy-dispersive X-ray spectroscopy, selected-area electron diffraction, microdiffraction and high-resolution transmission electron microscopy. A mixture of nanocrystallites and amorphous phases was observed for all beam scanning speeds used for deposition. High-resolution transmission electron microscopy demonstrated that the size of nanocrystallites in as-deposited nanorods ranges between 1.5 and 2.0nm. The direct evidence of the presence of pure W nanocrystallites in as-deposited nanorods was revealed by microdiffraction.

Original languageEnglish
Pages (from-to)1281-1289
Number of pages9
JournalPhilosophical Magazine
Volume84
Issue number12
DOIs
Publication statusPublished - 2004 Apr 21
Externally publishedYes

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nanorods
tungsten
electron beams
vapors
decomposition
scanning
transmission electron microscopy
high resolution
electron diffraction
electron microscopes
fabrication
Vapor
Decomposition
spectroscopy
x rays
Transmission Electron Microscopy
energy
Fabrication
Energy
Deposition

ASJC Scopus subject areas

  • Philosophy

Cite this

Nanostructure characterization of tungsten-containing nanorods deposited by electron-beam-induced chemical vapour decomposition. / Han, Ming; Mitsuishi, Kazutaka; Shimojo, Masayuki; Furuya, Kazuo.

In: Philosophical Magazine, Vol. 84, No. 12, 21.04.2004, p. 1281-1289.

Research output: Contribution to journalArticle

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