Nanostructure characterization of tungsten-containing nanorods deposited by electron-beam-induced chemical vapour decomposition

Ming Han, Kazutaka Mitsuishi, Masayuki Shimojo, Kazuo Furuya

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Electron-beam-induced chemical vapour decomposition was performed in a scanning transmission electron microscope using a precursor of tungsten carbonyl (W(CO)6). The self-supporting nanorods were grown from the edges of a C film with widths that depend on the electron-beam scanning speed used in the fabrication process. The nanostructure of as-deposited nanorods has been characterized in detail using energy-dispersive X-ray spectroscopy, selected-area electron diffraction, microdiffraction and high-resolution transmission electron microscopy. A mixture of nanocrystallites and amorphous phases was observed for all beam scanning speeds used for deposition. High-resolution transmission electron microscopy demonstrated that the size of nanocrystallites in as-deposited nanorods ranges between 1.5 and 2.0nm. The direct evidence of the presence of pure W nanocrystallites in as-deposited nanorods was revealed by microdiffraction.

Original languageEnglish
Pages (from-to)1281-1289
Number of pages9
JournalPhilosophical Magazine
Issue number12
Publication statusPublished - 2004 Apr 21
Externally publishedYes


ASJC Scopus subject areas

  • Philosophy

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