Abstract
Nanorod fabrication is performed by electron beam induced deposition (EBID) with iron carbonyl [Fe(CO)5] and tungsten carbonyl [W(CO) 6] precursors. The effects of water vapor addition to each metal carbonyl on the microstructure and composition of the obtained nanorods are studied. Normally, EBID-fabricated metal nanorods consist of an amorphous phase containing a considerable amount of carbon. However, it is found that water vapor addition to iron carbonyl can effectively reduce the carbon content of the nanorods and induce the formation of carbon-free crystalline Fe 3O4 nanorods with increasing partial pressure ratio of water vapor to iron carbonyl. In contrast, for tungsten carbonyl, water vapor addition has no obvious effect on carbon content reduction. The obtained nanorods consist of a carbon-rich amorphous matrix containing tungsten oxide nanocrystals inside.
| Original language | English |
|---|---|
| Pages (from-to) | 6183-6186 |
| Number of pages | 4 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 46 |
| Issue number | 9 B |
| DOIs | |
| Publication status | Published - 2007 Sep 20 |
| Externally published | Yes |
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Keywords
- Electron energy loss spectroscopy
- Electron-beam-induced deposition
- Nanorod
- Transmission electron microscopy
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
Cite this
Nanostructure fabrication by electron-beam-induced deposition with metal carbonyl precursor and water vapor. / Takeguchi, Masaki; Shimojo, Masayuki; Furuya, Kazuo.
In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 46, No. 9 B, 20.09.2007, p. 6183-6186.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Nanostructure fabrication by electron-beam-induced deposition with metal carbonyl precursor and water vapor
AU - Takeguchi, Masaki
AU - Shimojo, Masayuki
AU - Furuya, Kazuo
PY - 2007/9/20
Y1 - 2007/9/20
N2 - Nanorod fabrication is performed by electron beam induced deposition (EBID) with iron carbonyl [Fe(CO)5] and tungsten carbonyl [W(CO) 6] precursors. The effects of water vapor addition to each metal carbonyl on the microstructure and composition of the obtained nanorods are studied. Normally, EBID-fabricated metal nanorods consist of an amorphous phase containing a considerable amount of carbon. However, it is found that water vapor addition to iron carbonyl can effectively reduce the carbon content of the nanorods and induce the formation of carbon-free crystalline Fe 3O4 nanorods with increasing partial pressure ratio of water vapor to iron carbonyl. In contrast, for tungsten carbonyl, water vapor addition has no obvious effect on carbon content reduction. The obtained nanorods consist of a carbon-rich amorphous matrix containing tungsten oxide nanocrystals inside.
AB - Nanorod fabrication is performed by electron beam induced deposition (EBID) with iron carbonyl [Fe(CO)5] and tungsten carbonyl [W(CO) 6] precursors. The effects of water vapor addition to each metal carbonyl on the microstructure and composition of the obtained nanorods are studied. Normally, EBID-fabricated metal nanorods consist of an amorphous phase containing a considerable amount of carbon. However, it is found that water vapor addition to iron carbonyl can effectively reduce the carbon content of the nanorods and induce the formation of carbon-free crystalline Fe 3O4 nanorods with increasing partial pressure ratio of water vapor to iron carbonyl. In contrast, for tungsten carbonyl, water vapor addition has no obvious effect on carbon content reduction. The obtained nanorods consist of a carbon-rich amorphous matrix containing tungsten oxide nanocrystals inside.
KW - Electron energy loss spectroscopy
KW - Electron-beam-induced deposition
KW - Nanorod
KW - Transmission electron microscopy
UR - http://www.scopus.com/inward/record.url?scp=34648827593&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=34648827593&partnerID=8YFLogxK
U2 - 10.1143/JJAP.46.6183
DO - 10.1143/JJAP.46.6183
M3 - Article
AN - SCOPUS:34648827593
VL - 46
SP - 6183
EP - 6186
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 9 B
ER -