Nanostructure fabrication by electron-beam-induced deposition with metal carbonyl precursor and water vapor

Masaki Takeguchi, Masayuki Shimojo, Kazuo Furuya

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Nanorod fabrication is performed by electron beam induced deposition (EBID) with iron carbonyl [Fe(CO)5] and tungsten carbonyl [W(CO) 6] precursors. The effects of water vapor addition to each metal carbonyl on the microstructure and composition of the obtained nanorods are studied. Normally, EBID-fabricated metal nanorods consist of an amorphous phase containing a considerable amount of carbon. However, it is found that water vapor addition to iron carbonyl can effectively reduce the carbon content of the nanorods and induce the formation of carbon-free crystalline Fe 3O4 nanorods with increasing partial pressure ratio of water vapor to iron carbonyl. In contrast, for tungsten carbonyl, water vapor addition has no obvious effect on carbon content reduction. The obtained nanorods consist of a carbon-rich amorphous matrix containing tungsten oxide nanocrystals inside.

Original languageEnglish
Pages (from-to)6183-6186
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number9 B
Publication statusPublished - 2007 Sep 20



  • Electron energy loss spectroscopy
  • Electron-beam-induced deposition
  • Nanorod
  • Transmission electron microscopy

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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