Nanostructure fabrication by electron-beam-induced deposition with metal carbonyl precursor and water vapor

Masaki Takeguchi, Masayuki Shimojo, Kazuo Furuya

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

Nanorod fabrication is performed by electron beam induced deposition (EBID) with iron carbonyl [Fe(CO)5] and tungsten carbonyl [W(CO) 6] precursors. The effects of water vapor addition to each metal carbonyl on the microstructure and composition of the obtained nanorods are studied. Normally, EBID-fabricated metal nanorods consist of an amorphous phase containing a considerable amount of carbon. However, it is found that water vapor addition to iron carbonyl can effectively reduce the carbon content of the nanorods and induce the formation of carbon-free crystalline Fe 3O4 nanorods with increasing partial pressure ratio of water vapor to iron carbonyl. In contrast, for tungsten carbonyl, water vapor addition has no obvious effect on carbon content reduction. The obtained nanorods consist of a carbon-rich amorphous matrix containing tungsten oxide nanocrystals inside.

Original languageEnglish
Pages (from-to)6183-6186
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume46
Issue number9 B
DOIs
Publication statusPublished - 2007 Sep 20
Externally publishedYes

Fingerprint

nanofabrication
Nanorods
Water vapor
nanorods
water vapor
Electron beams
Nanostructures
electron beams
vapors
Fabrication
Metals
Carbon
carbon
metals
Tungsten
Iron
iron
tungsten
tungsten oxides
pressure ratio

Keywords

  • Electron energy loss spectroscopy
  • Electron-beam-induced deposition
  • Nanorod
  • Transmission electron microscopy

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

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title = "Nanostructure fabrication by electron-beam-induced deposition with metal carbonyl precursor and water vapor",
abstract = "Nanorod fabrication is performed by electron beam induced deposition (EBID) with iron carbonyl [Fe(CO)5] and tungsten carbonyl [W(CO) 6] precursors. The effects of water vapor addition to each metal carbonyl on the microstructure and composition of the obtained nanorods are studied. Normally, EBID-fabricated metal nanorods consist of an amorphous phase containing a considerable amount of carbon. However, it is found that water vapor addition to iron carbonyl can effectively reduce the carbon content of the nanorods and induce the formation of carbon-free crystalline Fe 3O4 nanorods with increasing partial pressure ratio of water vapor to iron carbonyl. In contrast, for tungsten carbonyl, water vapor addition has no obvious effect on carbon content reduction. The obtained nanorods consist of a carbon-rich amorphous matrix containing tungsten oxide nanocrystals inside.",
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T1 - Nanostructure fabrication by electron-beam-induced deposition with metal carbonyl precursor and water vapor

AU - Takeguchi, Masaki

AU - Shimojo, Masayuki

AU - Furuya, Kazuo

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Y1 - 2007/9/20

N2 - Nanorod fabrication is performed by electron beam induced deposition (EBID) with iron carbonyl [Fe(CO)5] and tungsten carbonyl [W(CO) 6] precursors. The effects of water vapor addition to each metal carbonyl on the microstructure and composition of the obtained nanorods are studied. Normally, EBID-fabricated metal nanorods consist of an amorphous phase containing a considerable amount of carbon. However, it is found that water vapor addition to iron carbonyl can effectively reduce the carbon content of the nanorods and induce the formation of carbon-free crystalline Fe 3O4 nanorods with increasing partial pressure ratio of water vapor to iron carbonyl. In contrast, for tungsten carbonyl, water vapor addition has no obvious effect on carbon content reduction. The obtained nanorods consist of a carbon-rich amorphous matrix containing tungsten oxide nanocrystals inside.

AB - Nanorod fabrication is performed by electron beam induced deposition (EBID) with iron carbonyl [Fe(CO)5] and tungsten carbonyl [W(CO) 6] precursors. The effects of water vapor addition to each metal carbonyl on the microstructure and composition of the obtained nanorods are studied. Normally, EBID-fabricated metal nanorods consist of an amorphous phase containing a considerable amount of carbon. However, it is found that water vapor addition to iron carbonyl can effectively reduce the carbon content of the nanorods and induce the formation of carbon-free crystalline Fe 3O4 nanorods with increasing partial pressure ratio of water vapor to iron carbonyl. In contrast, for tungsten carbonyl, water vapor addition has no obvious effect on carbon content reduction. The obtained nanorods consist of a carbon-rich amorphous matrix containing tungsten oxide nanocrystals inside.

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KW - Electron-beam-induced deposition

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KW - Transmission electron microscopy

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