Nanostructure fabrication by electron beam induced deposition with metal carbonyl precursor and water vapor

M. Takeguchi, M. Shimojo, K. Furuya

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)
Original languageEnglish
Pages (from-to)6183-6186
JournalJpn. J. Appl. Phys.
Volume46
Publication statusPublished - 2007 Jan 1

Cite this