Nanostructure fabrication by electron beam induced deposition with metal carbonyl precursor and water vapor

M. Takeguchi, M. Shimojo, K. Furuya

Research output: Contribution to journalArticle

16 Citations (Scopus)
Original languageEnglish
Pages (from-to)6183-6186
JournalJpn. J. Appl. Phys.
Volume46
Publication statusPublished - 2007 Jan 1

Cite this

Nanostructure fabrication by electron beam induced deposition with metal carbonyl precursor and water vapor. / Takeguchi, M.; Shimojo, M.; Furuya, K.

In: Jpn. J. Appl. Phys., Vol. 46, 01.01.2007, p. 6183-6186.

Research output: Contribution to journalArticle

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