Nanostructures fabricated by electron beam induced chemical vapor deposition

M. Takeguchi, Masayuki Shimojo, K. Mitsuishi, M. Tanaka, K. Furuya

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

Electron beam induced chemical vapor deposition (EBICVD) with tungsten and iron carbonyl gases, W(CO)6 and Fe(CO)5, was attempted to fabricate nanostructures. In case of the deposits from W(CO)6 gas, the structure was a mixture of nanocrystals and amorphous phases and no change was seen after a post-deposition heating treatment. On the other hand, the deposits from Fe(CO)5 gas were composed of amorphous iron surrounded by Fe oxide nanocrystals, and heating at about 600 °C resulted in the formation of crystalline Fe carbide and alpha-Fe phases. Thus, it was demonstrated that EBICVD with Fe(CO)5 gas followed by a heating treatment can be used practically to fabricate nanostructures of magnetic materials.

Original languageEnglish
Pages (from-to)255-264
Number of pages10
JournalSuperlattices and Microstructures
Volume36
Issue number1-3
DOIs
Publication statusPublished - 2004 Jul
Externally publishedYes

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Chemical vapor deposition
Electron beams
Nanostructures
Gases
vapor deposition
electron beams
gases
Heating
Nanocrystals
heating
nanocrystals
Deposits
Iron
deposits
iron
Tungsten
Magnetic materials
magnetic materials
carbides
Oxides

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Nanostructures fabricated by electron beam induced chemical vapor deposition. / Takeguchi, M.; Shimojo, Masayuki; Mitsuishi, K.; Tanaka, M.; Furuya, K.

In: Superlattices and Microstructures, Vol. 36, No. 1-3, 07.2004, p. 255-264.

Research output: Contribution to journalArticle

Takeguchi, M. ; Shimojo, Masayuki ; Mitsuishi, K. ; Tanaka, M. ; Furuya, K. / Nanostructures fabricated by electron beam induced chemical vapor deposition. In: Superlattices and Microstructures. 2004 ; Vol. 36, No. 1-3. pp. 255-264.
@article{4cbe7ca64aca4f169c491f21916bd608,
title = "Nanostructures fabricated by electron beam induced chemical vapor deposition",
abstract = "Electron beam induced chemical vapor deposition (EBICVD) with tungsten and iron carbonyl gases, W(CO)6 and Fe(CO)5, was attempted to fabricate nanostructures. In case of the deposits from W(CO)6 gas, the structure was a mixture of nanocrystals and amorphous phases and no change was seen after a post-deposition heating treatment. On the other hand, the deposits from Fe(CO)5 gas were composed of amorphous iron surrounded by Fe oxide nanocrystals, and heating at about 600 °C resulted in the formation of crystalline Fe carbide and alpha-Fe phases. Thus, it was demonstrated that EBICVD with Fe(CO)5 gas followed by a heating treatment can be used practically to fabricate nanostructures of magnetic materials.",
author = "M. Takeguchi and Masayuki Shimojo and K. Mitsuishi and M. Tanaka and K. Furuya",
year = "2004",
month = "7",
doi = "10.1016/j.spmi.2004.08.038",
language = "English",
volume = "36",
pages = "255--264",
journal = "Superlattices and Microstructures",
issn = "0749-6036",
publisher = "Academic Press Inc.",
number = "1-3",

}

TY - JOUR

T1 - Nanostructures fabricated by electron beam induced chemical vapor deposition

AU - Takeguchi, M.

AU - Shimojo, Masayuki

AU - Mitsuishi, K.

AU - Tanaka, M.

AU - Furuya, K.

PY - 2004/7

Y1 - 2004/7

N2 - Electron beam induced chemical vapor deposition (EBICVD) with tungsten and iron carbonyl gases, W(CO)6 and Fe(CO)5, was attempted to fabricate nanostructures. In case of the deposits from W(CO)6 gas, the structure was a mixture of nanocrystals and amorphous phases and no change was seen after a post-deposition heating treatment. On the other hand, the deposits from Fe(CO)5 gas were composed of amorphous iron surrounded by Fe oxide nanocrystals, and heating at about 600 °C resulted in the formation of crystalline Fe carbide and alpha-Fe phases. Thus, it was demonstrated that EBICVD with Fe(CO)5 gas followed by a heating treatment can be used practically to fabricate nanostructures of magnetic materials.

AB - Electron beam induced chemical vapor deposition (EBICVD) with tungsten and iron carbonyl gases, W(CO)6 and Fe(CO)5, was attempted to fabricate nanostructures. In case of the deposits from W(CO)6 gas, the structure was a mixture of nanocrystals and amorphous phases and no change was seen after a post-deposition heating treatment. On the other hand, the deposits from Fe(CO)5 gas were composed of amorphous iron surrounded by Fe oxide nanocrystals, and heating at about 600 °C resulted in the formation of crystalline Fe carbide and alpha-Fe phases. Thus, it was demonstrated that EBICVD with Fe(CO)5 gas followed by a heating treatment can be used practically to fabricate nanostructures of magnetic materials.

UR - http://www.scopus.com/inward/record.url?scp=9644274270&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=9644274270&partnerID=8YFLogxK

U2 - 10.1016/j.spmi.2004.08.038

DO - 10.1016/j.spmi.2004.08.038

M3 - Article

VL - 36

SP - 255

EP - 264

JO - Superlattices and Microstructures

JF - Superlattices and Microstructures

SN - 0749-6036

IS - 1-3

ER -