Nanostructures fabricated by electron beam induced chemical vapor deposition

M. Takeguchi; M. Shimojo; K. Mitsuishi; M. Tanaka; K. Furuya

doi:10.1016/j.spmi.2004.08.038

Nanostructures fabricated by electron beam induced chemical vapor deposition

M. Takeguchi, M. Shimojo, K. Mitsuishi, M. Tanaka, K. Furuya

Research output: Contribution to journal › Conference article › peer-review

9 Citations (Scopus)

Abstract

Electron beam induced chemical vapor deposition (EBICVD) with tungsten and iron carbonyl gases, W(CO)₆ and Fe(CO)₅, was attempted to fabricate nanostructures. In case of the deposits from W(CO)₆ gas, the structure was a mixture of nanocrystals and amorphous phases and no change was seen after a post-deposition heating treatment. On the other hand, the deposits from Fe(CO)₅ gas were composed of amorphous iron surrounded by Fe oxide nanocrystals, and heating at about 600 °C resulted in the formation of crystalline Fe carbide and alpha-Fe phases. Thus, it was demonstrated that EBICVD with Fe(CO)₅ gas followed by a heating treatment can be used practically to fabricate nanostructures of magnetic materials.

Original language	English
Pages (from-to)	255-264
Number of pages	10
Journal	Superlattices and Microstructures
Volume	36
Issue number	1-3
DOIs	https://doi.org/10.1016/j.spmi.2004.08.038
Publication status	Published - 2004 Jul 1
Externally published	Yes
Event	European Materials Research Society 2004 - Strasbourg, France Duration: 2004 May 24 → 2004 May 28

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Electrical and Electronic Engineering

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10.1016/j.spmi.2004.08.038

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title = "Nanostructures fabricated by electron beam induced chemical vapor deposition",

abstract = "Electron beam induced chemical vapor deposition (EBICVD) with tungsten and iron carbonyl gases, W(CO)6 and Fe(CO)5, was attempted to fabricate nanostructures. In case of the deposits from W(CO)6 gas, the structure was a mixture of nanocrystals and amorphous phases and no change was seen after a post-deposition heating treatment. On the other hand, the deposits from Fe(CO)5 gas were composed of amorphous iron surrounded by Fe oxide nanocrystals, and heating at about 600 °C resulted in the formation of crystalline Fe carbide and alpha-Fe phases. Thus, it was demonstrated that EBICVD with Fe(CO)5 gas followed by a heating treatment can be used practically to fabricate nanostructures of magnetic materials.",

author = "M. Takeguchi and M. Shimojo and K. Mitsuishi and M. Tanaka and K. Furuya",

year = "2004",

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doi = "10.1016/j.spmi.2004.08.038",

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pages = "255--264",

journal = "Superlattices and Microstructures",

issn = "0749-6036",

publisher = "Academic Press Inc.",

number = "1-3",

note = "European Materials Research Society 2004 ; Conference date: 24-05-2004 Through 28-05-2004",

}

TY - JOUR

T1 - Nanostructures fabricated by electron beam induced chemical vapor deposition

AU - Takeguchi, M.

AU - Shimojo, M.

AU - Mitsuishi, K.

AU - Tanaka, M.

AU - Furuya, K.

PY - 2004/7/1

Y1 - 2004/7/1

N2 - Electron beam induced chemical vapor deposition (EBICVD) with tungsten and iron carbonyl gases, W(CO)6 and Fe(CO)5, was attempted to fabricate nanostructures. In case of the deposits from W(CO)6 gas, the structure was a mixture of nanocrystals and amorphous phases and no change was seen after a post-deposition heating treatment. On the other hand, the deposits from Fe(CO)5 gas were composed of amorphous iron surrounded by Fe oxide nanocrystals, and heating at about 600 °C resulted in the formation of crystalline Fe carbide and alpha-Fe phases. Thus, it was demonstrated that EBICVD with Fe(CO)5 gas followed by a heating treatment can be used practically to fabricate nanostructures of magnetic materials.

AB - Electron beam induced chemical vapor deposition (EBICVD) with tungsten and iron carbonyl gases, W(CO)6 and Fe(CO)5, was attempted to fabricate nanostructures. In case of the deposits from W(CO)6 gas, the structure was a mixture of nanocrystals and amorphous phases and no change was seen after a post-deposition heating treatment. On the other hand, the deposits from Fe(CO)5 gas were composed of amorphous iron surrounded by Fe oxide nanocrystals, and heating at about 600 °C resulted in the formation of crystalline Fe carbide and alpha-Fe phases. Thus, it was demonstrated that EBICVD with Fe(CO)5 gas followed by a heating treatment can be used practically to fabricate nanostructures of magnetic materials.

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DO - 10.1016/j.spmi.2004.08.038

M3 - Conference article

AN - SCOPUS:9644274270

SN - 0749-6036

VL - 36

SP - 255

EP - 264

JO - Superlattices and Microstructures

JF - Superlattices and Microstructures

IS - 1-3

T2 - European Materials Research Society 2004

Y2 - 24 May 2004 through 28 May 2004

ER -

Nanostructures fabricated by electron beam induced chemical vapor deposition

Abstract

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