Nanostructures fabrication by electron beam induced deposition with Fe(CO)5 and H2O followed by thermal treatment

M. Takeguchi, R. Che, M. Shimojo, K. Furuya

Research output: Contribution to journalArticle

Original languageEnglish
JournalDefault journal
Publication statusPublished - 2006 Oct 1

Cite this

Nanostructures fabrication by electron beam induced deposition with Fe(CO)5 and H2O followed by thermal treatment. / Takeguchi, M.; Che, R.; Shimojo, M.; Furuya, K.

In: Default journal, 01.10.2006.

Research output: Contribution to journalArticle

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AU - Furuya, K.

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