Near-field acoustic levitatin of 8 Si wafer and glass substrate using flexural vibration

Y.Hashimoto Y.Hashimoto, Y.Koike Y.Koike, S.Ueha S.Ueha, Yoshikazu Koike

Research output: Contribution to journal › Article › peer-review

Cite this

@article{4c54b3f757fe48a8a7ff8c3688ac071b,

title = "Near-field acoustic levitatin of 8 Si wafer and glass substrate using flexural vibration",

author = "Y.Hashimoto Y.Hashimoto and Y.Koike Y.Koike and S.Ueha S.Ueha and Yoshikazu Koike",

year = "1996",

month = may,

day = "1",

language = "English",

pages = "500--505",

journal = "Default journal",

}