Near-field acoustic levitatin of 8 Si wafer and glass substrate using flexural vibration

Y.Hashimoto Y.Hashimoto, Y.Koike Y.Koike, S.Ueha S.Ueha, Yoshikazu Koike

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)500-505
JournalDefault journal
Publication statusPublished - 1996 May 1

Cite this

Near-field acoustic levitatin of 8 Si wafer and glass substrate using flexural vibration. / Y.Hashimoto, Y.Hashimoto; Y.Koike, Y.Koike; S.Ueha, S.Ueha; Koike, Yoshikazu.

In: Default journal, 01.05.1996, p. 500-505.

Research output: Contribution to journalArticle

Y.Hashimoto, Y.Hashimoto ; Y.Koike, Y.Koike ; S.Ueha, S.Ueha ; Koike, Yoshikazu. / Near-field acoustic levitatin of 8 Si wafer and glass substrate using flexural vibration. In: Default journal. 1996 ; pp. 500-505.
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