Near-field acoustic levitatin of 8 Si wafer and glass substrate using flexural vibration

Y.Hashimoto Y.Hashimoto, Y.Koike Y.Koike, S.Ueha S.Ueha, Yoshikazu Koike

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)500-505
JournalDefault journal
Publication statusPublished - 1996 May 1

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