Near-field acoustic levitation of planar specimens using flexural vibration

Yoshiki Hashimoto, Yoshikazu Koike, Sadayuki Ueha

Research output: Contribution to journalArticle

81 Citations (Scopus)

Abstract

In conventional acoustic levitation, the specimens to be levitated are limited to very light crees of u few milligrams to a few tens of milligrams. The authors have learned that specimens with a weight of several kilograms can be levirated stably by direct sound radiation pressure. The specimen material is not important. The requirement is only that the surface of the specimen exposed to the sound wave must be flat. The fundamental characteristics of near-field levitation were experimentally studied with the use of a flexural vibration plate. The following results were obtained: (1) The size of levitation specimen should be longer than 3/2 wavelength of the flexural vibration in order to levitare stably. (2) The relationship between the levitation distance and the mass per unit area is proportion to -1/2 power. (3) The levitation distance is proportional to the displacement amplitude. This phenomenon can be used in noncontact transportation of planar objects such as Si wafer and glass plates.

Original languageEnglish
Pages (from-to)2057-2061
Number of pages5
JournalJournal of the Acoustical Society of America
Volume100
Issue number4 pt 1
DOIs
Publication statusPublished - 1996 Oct
Externally publishedYes

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acoustic levitation
levitation
near fields
vibration
radiation pressure
sound pressure
sound waves
proportion
Acoustics
Sound
wafers
requirements
glass
wavelengths

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

Cite this

Near-field acoustic levitation of planar specimens using flexural vibration. / Hashimoto, Yoshiki; Koike, Yoshikazu; Ueha, Sadayuki.

In: Journal of the Acoustical Society of America, Vol. 100, No. 4 pt 1, 10.1996, p. 2057-2061.

Research output: Contribution to journalArticle

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