Negative Epoxy Resist for Permanent Use Optimized for Proton Beam Writing

H. Nishikawa, T. Nishiura, T. Mita, T. Takemori

Research output: Contribution to journalArticle

Original languageEnglish
JournalInternational Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB
Publication statusPublished - 2011 Jun 1

Cite this