New equipment for evaluating performance of microelements on MEMS

Y. Higo, K. Takashima, M. Shimojo, S. Sugiura, M. V. Swain

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)997-1000
JournalDefault journal
Publication statusPublished - 2000 Jan 1

Cite this

Higo, Y., Takashima, K., Shimojo, M., Sugiura, S., & Swain, M. V. (2000). New equipment for evaluating performance of microelements on MEMS. Default journal, 997-1000.