New equipment for evaluating performance of microelements on MEMS

Y. Higo, K. Takashima, M. Shimojo, S. Sugiura, M. V. Swain

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)997-1000
JournalDefault journal
Publication statusPublished - 2000 Jan 1

Cite this

Higo, Y., Takashima, K., Shimojo, M., Sugiura, S., & Swain, M. V. (2000). New equipment for evaluating performance of microelements on MEMS. Default journal, 997-1000.

New equipment for evaluating performance of microelements on MEMS. / Higo, Y.; Takashima, K.; Shimojo, M.; Sugiura, S.; Swain, M. V.

In: Default journal, 01.01.2000, p. 997-1000.

Research output: Contribution to journalArticle

Higo, Y, Takashima, K, Shimojo, M, Sugiura, S & Swain, MV 2000, 'New equipment for evaluating performance of microelements on MEMS', Default journal, pp. 997-1000.
Higo Y, Takashima K, Shimojo M, Sugiura S, Swain MV. New equipment for evaluating performance of microelements on MEMS. Default journal. 2000 Jan 1;997-1000.
Higo, Y. ; Takashima, K. ; Shimojo, M. ; Sugiura, S. ; Swain, M. V. / New equipment for evaluating performance of microelements on MEMS. In: Default journal. 2000 ; pp. 997-1000.
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