| Original language | English |
|---|---|
| Pages (from-to) | 997-1000 |
| Journal | Default journal |
| Publication status | Published - 2000 Jan 1 |
New equipment for evaluating performance of microelements on MEMS
Y. Higo, K. Takashima, M. Shimojo, S. Sugiura, M. V. Swain
Research output: Contribution to journal › Article › peer-review