New method for Characterizing Dielectric Properties of High-k Films Using Time-Dependent Open-Circuit Potential Measurement

K. Kita, M. Sasagawa, K. Kyuno, A. Toriumi

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)66-67
JournalDefault journal
Publication statusPublished - 2002 Sep 1

Cite this

New method for Characterizing Dielectric Properties of High-k Films Using Time-Dependent Open-Circuit Potential Measurement. / Kita, K.; Sasagawa, M.; Kyuno, K.; Toriumi, A.

In: Default journal, 01.09.2002, p. 66-67.

Research output: Contribution to journalArticle

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