New method for Characterizing Dielectric Properties of High-k Films Using Time-Dependent Open-Circuit Potential Measurement

K. Kita, M. Sasagawa, K. Kyuno, A. Toriumi

Research output: Contribution to journal › Article › peer-review

Cite this

@article{ad2a8f6fd0754d6f99d6eb55974bd385,

title = "New method for Characterizing Dielectric Properties of High-k Films Using Time-Dependent Open-Circuit Potential Measurement",

author = "K. Kita and M. Sasagawa and K. Kyuno and A. Toriumi",

year = "2002",

month = sep,

day = "1",

language = "English",

pages = "66--67",

journal = "Default journal",

}