Original language | English |
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Pages (from-to) | 66-67 |
Journal | Default journal |
Publication status | Published - 2002 Sep 1 |
New method for Characterizing Dielectric Properties of High-k Films Using Time-Dependent Open-Circuit Potential Measurement
K. Kita, M. Sasagawa, K. Kyuno, A. Toriumi
Research output: Contribution to journal › Article › peer-review