| Original language | English |
|---|---|
| Pages (from-to) | 66-67 |
| Journal | Default journal |
| Publication status | Published - 2002 Sep 1 |
Cite this
Kita, K., Sasagawa, M., Kyuno, K., & Toriumi, A. (2002). New method for Characterizing Dielectric Properties of High-k Films Using Time-Dependent Open-Circuit Potential Measurement. Default journal, 66-67.
New method for Characterizing Dielectric Properties of High-k Films Using Time-Dependent Open-Circuit Potential Measurement. / Kita, K.; Sasagawa, M.; Kyuno, K.; Toriumi, A.
In: Default journal, 01.09.2002, p. 66-67.Research output: Contribution to journal › Article
Kita, K, Sasagawa, M, Kyuno, K & Toriumi, A 2002, 'New method for Characterizing Dielectric Properties of High-k Films Using Time-Dependent Open-Circuit Potential Measurement', Default journal, pp. 66-67.
Kita K, Sasagawa M, Kyuno K, Toriumi A. New method for Characterizing Dielectric Properties of High-k Films Using Time-Dependent Open-Circuit Potential Measurement. Default journal. 2002 Sep 1;66-67.
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title = "New method for Characterizing Dielectric Properties of High-k Films Using Time-Dependent Open-Circuit Potential Measurement",
author = "K. Kita and M. Sasagawa and K. Kyuno and A. Toriumi",
year = "2002",
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T1 - New method for Characterizing Dielectric Properties of High-k Films Using Time-Dependent Open-Circuit Potential Measurement
AU - Kita, K.
AU - Sasagawa, M.
AU - Kyuno, K.
AU - Toriumi, A.
PY - 2002/9/1
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M3 - Article
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EP - 67
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