New methodology for microwave/millimeter-wave MMIC development

Kenji Kamogawa, Kenjiro Nishikawa, Ichihiko Toyoda, Masami Tokumitsu, Makoto Hirano, Tadao Nakagawa, Masahiro Muraguchi

Research output: Chapter in Book/Report/Conference proceedingChapter

5 Citations (Scopus)

Abstract

A new MMIC development methodology that combines suitable devices with the 3D/multilayer interconnection process is presented. This approach allows the designer to choose the process so as to realize high performance and low cost. The integration of 0.15-μm pHEMT and 3D interconnection technologies is demonstrated. The slight changes of FET parameter with polyimide layer use can be easily incorporated into MMIC design and development.

Original languageEnglish
Title of host publicationIEEE MTT-S International Microwave Symposium Digest
Pages1913-1916
Number of pages4
Volume3
Publication statusPublished - 2000
Externally publishedYes
EventProceedings of the 1999 IEEE MTT-S International Microwave Symposium - Boston, MA, USA
Duration: 2000 Jun 112000 Jun 16

Other

OtherProceedings of the 1999 IEEE MTT-S International Microwave Symposium
CityBoston, MA, USA
Period00/6/1100/6/16

Fingerprint

Monolithic microwave integrated circuits
Millimeter waves
millimeter waves
Microwaves
methodology
microwaves
Field effect transistors
polyimides
Polyimides
Multilayers
field effect transistors
costs
Costs

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Kamogawa, K., Nishikawa, K., Toyoda, I., Tokumitsu, M., Hirano, M., Nakagawa, T., & Muraguchi, M. (2000). New methodology for microwave/millimeter-wave MMIC development. In IEEE MTT-S International Microwave Symposium Digest (Vol. 3, pp. 1913-1916)

New methodology for microwave/millimeter-wave MMIC development. / Kamogawa, Kenji; Nishikawa, Kenjiro; Toyoda, Ichihiko; Tokumitsu, Masami; Hirano, Makoto; Nakagawa, Tadao; Muraguchi, Masahiro.

IEEE MTT-S International Microwave Symposium Digest. Vol. 3 2000. p. 1913-1916.

Research output: Chapter in Book/Report/Conference proceedingChapter

Kamogawa, K, Nishikawa, K, Toyoda, I, Tokumitsu, M, Hirano, M, Nakagawa, T & Muraguchi, M 2000, New methodology for microwave/millimeter-wave MMIC development. in IEEE MTT-S International Microwave Symposium Digest. vol. 3, pp. 1913-1916, Proceedings of the 1999 IEEE MTT-S International Microwave Symposium, Boston, MA, USA, 00/6/11.
Kamogawa K, Nishikawa K, Toyoda I, Tokumitsu M, Hirano M, Nakagawa T et al. New methodology for microwave/millimeter-wave MMIC development. In IEEE MTT-S International Microwave Symposium Digest. Vol. 3. 2000. p. 1913-1916
Kamogawa, Kenji ; Nishikawa, Kenjiro ; Toyoda, Ichihiko ; Tokumitsu, Masami ; Hirano, Makoto ; Nakagawa, Tadao ; Muraguchi, Masahiro. / New methodology for microwave/millimeter-wave MMIC development. IEEE MTT-S International Microwave Symposium Digest. Vol. 3 2000. pp. 1913-1916
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