New methodology for microwave/millimeter-wave MMIC development

Kenji Kamogawa; Kenjiro Nishikawa; Ichihiko Toyoda; Masami Tokumitsu; Makoto Hirano; Tadao Nakagawa; Masahiro Muraguchi

New methodology for microwave/millimeter-wave MMIC development

Kenji Kamogawa, Kenjiro Nishikawa, Ichihiko Toyoda, Masami Tokumitsu, Makoto Hirano, Tadao Nakagawa, Masahiro Muraguchi

Research output: Contribution to journal › Conference article › peer-review

Abstract

A new MMIC development methodology that combines suitable devices with the 3D/multilayer interconnection process is presented. This approach allows the designer to choose the process so as to realize high performance and low cost. The integration of 0.15-μm pHEMT and 3D interconnection technologies is demonstrated. The slight changes of FET parameter with polyimide layer use can be easily incorporated into MMIC design and development.

Original language	English
Pages (from-to)	1913-1916
Number of pages	4
Journal	IEEE MTT-S International Microwave Symposium Digest
Volume	3
Publication status	Published - 2000 Dec 11
Event	Proceedings of the 1999 IEEE MTT-S International Microwave Symposium - Boston, MA, USA Duration: 2000 Jun 11 → 2000 Jun 16

ASJC Scopus subject areas

Radiation
Condensed Matter Physics
Electrical and Electronic Engineering

Cite this

@article{dfcd46e12d694f6cbdbb0c151f137614,

title = "New methodology for microwave/millimeter-wave MMIC development",

abstract = "A new MMIC development methodology that combines suitable devices with the 3D/multilayer interconnection process is presented. This approach allows the designer to choose the process so as to realize high performance and low cost. The integration of 0.15-μm pHEMT and 3D interconnection technologies is demonstrated. The slight changes of FET parameter with polyimide layer use can be easily incorporated into MMIC design and development.",

author = "Kenji Kamogawa and Kenjiro Nishikawa and Ichihiko Toyoda and Masami Tokumitsu and Makoto Hirano and Tadao Nakagawa and Masahiro Muraguchi",

year = "2000",

month = dec,

day = "11",

language = "English",

volume = "3",

pages = "1913--1916",

journal = "IEEE MTT-S International Microwave Symposium Digest",

issn = "0149-645X",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "Proceedings of the 1999 IEEE MTT-S International Microwave Symposium ; Conference date: 11-06-2000 Through 16-06-2000",

}

TY - JOUR

T1 - New methodology for microwave/millimeter-wave MMIC development

AU - Kamogawa, Kenji

AU - Nishikawa, Kenjiro

AU - Toyoda, Ichihiko

AU - Tokumitsu, Masami

AU - Hirano, Makoto

AU - Nakagawa, Tadao

AU - Muraguchi, Masahiro

PY - 2000/12/11

Y1 - 2000/12/11

N2 - A new MMIC development methodology that combines suitable devices with the 3D/multilayer interconnection process is presented. This approach allows the designer to choose the process so as to realize high performance and low cost. The integration of 0.15-μm pHEMT and 3D interconnection technologies is demonstrated. The slight changes of FET parameter with polyimide layer use can be easily incorporated into MMIC design and development.

AB - A new MMIC development methodology that combines suitable devices with the 3D/multilayer interconnection process is presented. This approach allows the designer to choose the process so as to realize high performance and low cost. The integration of 0.15-μm pHEMT and 3D interconnection technologies is demonstrated. The slight changes of FET parameter with polyimide layer use can be easily incorporated into MMIC design and development.

UR - http://www.scopus.com/inward/record.url?scp=0033724439&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033724439&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0033724439

SN - 0149-645X

VL - 3

SP - 1913

EP - 1916

JO - IEEE MTT-S International Microwave Symposium Digest

JF - IEEE MTT-S International Microwave Symposium Digest

T2 - Proceedings of the 1999 IEEE MTT-S International Microwave Symposium

Y2 - 11 June 2000 through 16 June 2000

ER -

New methodology for microwave/millimeter-wave MMIC development

Abstract

ASJC Scopus subject areas

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