No external load measurement strategy for micro thermoelectric generator based on high-performance Si1−x−yGexSny film

Ying Peng, Sijing Zhu, Huajun Lai, Jie Gao, Masashi Kurosawa, Osamu Nakatsuka, Sakae Tanemura, Biaolin Peng, Lei Miao

Research output: Contribution to journalArticlepeer-review

Abstract

In this study, a micro in-plane p-type thermoelectric generator (TEG), which consists of thin-film Si1−x−yGexSny ternary alloy semiconductor on insulator, is developed to make efficient use of waste heat such as human body. A power factor value as high as 1095 μWm−1K−2 had been achieved using B-ion implanted and short-term rapid thermal annealing (RTA) process. In addition, a measuring scheme for micro TEG without external load resistance was designed. In one measuring session, multiple parameters can be measured. The micro single-arm TEG prepared by semiconductor process can output 0.29 nW power at a temperature difference of 15 K, and a cross-sectional power density has reached up to 0.58 mW/cm2, which is a superior value for wearable device. The findings of this study have important reference value for wearable device performance improvement and output power measuring of micro TEG.

Original languageEnglish
JournalJournal of Materiomics
DOIs
Publication statusAccepted/In press - 2021

Keywords

  • Ambient power density
  • No external load measurement
  • P-type TEG
  • SiGeSn thin film

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Metals and Alloys

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