Novel Fabricaiton Technology for Ultra-Compact Three-Dimensional MMICs

Suehiro Sugitani, Kiyomitsu Onodera, Sinji Aoyama, Makoto Hirano, Kimiyoshi Ymazaki

    Research output: Contribution to journalArticle

    Original languageEnglish
    JournalDefault journal
    Publication statusPublished - 1997 Apr 1

    Cite this

    Sugitani, S., Onodera, K., Aoyama, S., Hirano, M., & Ymazaki, K. (1997). Novel Fabricaiton Technology for Ultra-Compact Three-Dimensional MMICs. Default journal.