Novel structure and fabrication of an energy harvesting device based on vibration-oriented generation for low oscillation operation

Takafumi Suzuki, Sumito Nagasawa, Hiroshi Okamoto, Hiroki Kuwano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We propose and implemented a novel structure and fabrication method of a micro energy harvesting device based on vibration-driven power generation that matches the surrounding oscillation frequency. When the micro energy harvesting device vibrates at its own resonant frequency, its output maximizes. However, a micro device usually has a high resonant frequency, because of the size. We succeeded in lowering the resonant frequency without scaling-up the device using Si micromachining technology. We propose a structure in which a polymer with a low Young's modulus is embedded in a Hybrid Silicon Micro Structure (HSMS). We applied the structure to a micro cantilever generator with an electret that is 3.5 mm long, 1.0 mm wide and 115 μm thick. We demonstrated that the HSMS generator has a low resonant frequency and consequently is efficient at low frequencies.

Original languageEnglish
Title of host publicationIEEE Sensors 2009 Conference - SENSORS 2009
Pages1832-1835
Number of pages4
DOIs
Publication statusPublished - 2009 Dec 1
EventIEEE Sensors 2009 Conference - SENSORS 2009 - Christchurch, New Zealand
Duration: 2009 Oct 252009 Oct 28

Publication series

NameProceedings of IEEE Sensors

Conference

ConferenceIEEE Sensors 2009 Conference - SENSORS 2009
CountryNew Zealand
CityChristchurch
Period09/10/2509/10/28

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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    Suzuki, T., Nagasawa, S., Okamoto, H., & Kuwano, H. (2009). Novel structure and fabrication of an energy harvesting device based on vibration-oriented generation for low oscillation operation. In IEEE Sensors 2009 Conference - SENSORS 2009 (pp. 1832-1835). [5398426] (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2009.5398426