Abstract
We propose and implemented a novel structure and fabrication method of a micro energy harvesting device based on vibration-driven power generation that matches the surrounding oscillation frequency. When the micro energy harvesting device vibrates at its own resonant frequency, its output maximizes. However, a micro device usually has a high resonant frequency, because of the size. We succeeded in lowering the resonant frequency without scaling-up the device using Si micromachining technology. We propose a structure in which a polymer with a low Young's modulus is embedded in a Hybrid Silicon Micro Structure (HSMS). We applied the structure to a micro cantilever generator with an electret that is 3.5 mm long, 1.0 mm wide and 115 μm thick. We demonstrated that the HSMS generator has a low resonant frequency and consequently is efficient at low frequencies.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of IEEE Sensors |
| Pages | 1832-1835 |
| Number of pages | 4 |
| DOIs | |
| Publication status | Published - 2009 |
| Externally published | Yes |
| Event | IEEE Sensors 2009 Conference - SENSORS 2009 - Christchurch Duration: 2009 Oct 25 → 2009 Oct 28 |
Other
| Other | IEEE Sensors 2009 Conference - SENSORS 2009 |
|---|---|
| City | Christchurch |
| Period | 09/10/25 → 09/10/28 |
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ASJC Scopus subject areas
- Electrical and Electronic Engineering
Cite this
Novel structure and fabrication of an energy harvesting device based on vibration-oriented generation for low oscillation operation. / Suzuki, Takafumi; Nagasawa, Sumito; Okamoto, Hiroshi; Kuwano, Hiroki.
Proceedings of IEEE Sensors. 2009. p. 1832-1835 5398426.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Novel structure and fabrication of an energy harvesting device based on vibration-oriented generation for low oscillation operation
AU - Suzuki, Takafumi
AU - Nagasawa, Sumito
AU - Okamoto, Hiroshi
AU - Kuwano, Hiroki
PY - 2009
Y1 - 2009
N2 - We propose and implemented a novel structure and fabrication method of a micro energy harvesting device based on vibration-driven power generation that matches the surrounding oscillation frequency. When the micro energy harvesting device vibrates at its own resonant frequency, its output maximizes. However, a micro device usually has a high resonant frequency, because of the size. We succeeded in lowering the resonant frequency without scaling-up the device using Si micromachining technology. We propose a structure in which a polymer with a low Young's modulus is embedded in a Hybrid Silicon Micro Structure (HSMS). We applied the structure to a micro cantilever generator with an electret that is 3.5 mm long, 1.0 mm wide and 115 μm thick. We demonstrated that the HSMS generator has a low resonant frequency and consequently is efficient at low frequencies.
AB - We propose and implemented a novel structure and fabrication method of a micro energy harvesting device based on vibration-driven power generation that matches the surrounding oscillation frequency. When the micro energy harvesting device vibrates at its own resonant frequency, its output maximizes. However, a micro device usually has a high resonant frequency, because of the size. We succeeded in lowering the resonant frequency without scaling-up the device using Si micromachining technology. We propose a structure in which a polymer with a low Young's modulus is embedded in a Hybrid Silicon Micro Structure (HSMS). We applied the structure to a micro cantilever generator with an electret that is 3.5 mm long, 1.0 mm wide and 115 μm thick. We demonstrated that the HSMS generator has a low resonant frequency and consequently is efficient at low frequencies.
UR - http://www.scopus.com/inward/record.url?scp=77951105514&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=77951105514&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2009.5398426
DO - 10.1109/ICSENS.2009.5398426
M3 - Conference contribution
AN - SCOPUS:77951105514
SN - 9781424445486
SP - 1832
EP - 1835
BT - Proceedings of IEEE Sensors
ER -