Observation of laser-induced surface waves on flat silicon surface

Takuro Tomita; Yasuhiro Fukumori; Keita Kinoshita; Shigeki Matsuo; Shuichi Hashimoto

doi:10.1063/1.2828983

Observation of laser-induced surface waves on flat silicon surface

Takuro Tomita, Yasuhiro Fukumori, Keita Kinoshita, Shigeki Matsuo, Shuichi Hashimoto

Research output: Contribution to journal › Article › peer-review

46 Citations (Scopus)

Abstract

We found that irradiation by a single femtosecond laser pulse produced a surface wave structure on a (100) silicon surface. The surface wave structure bearing a concentric shape was produced only in the edge regions in the direction of the electric field from the center. The increase in the number of irradiating pulses allowed the concentric structure gradually to align perpendicularly to the laser beam's electric field. The period of the surface wave structure was nearly equal to the wavelength of the irradiating laser pulse. In this accord, we propose that this structure is a precursor of ripple formation.

Original language	English
Article number	013104
Journal	Applied Physics Letters
Volume	92
Issue number	1
DOIs	https://doi.org/10.1063/1.2828983
Publication status	Published - 2008
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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title = "Observation of laser-induced surface waves on flat silicon surface",

abstract = "We found that irradiation by a single femtosecond laser pulse produced a surface wave structure on a (100) silicon surface. The surface wave structure bearing a concentric shape was produced only in the edge regions in the direction of the electric field from the center. The increase in the number of irradiating pulses allowed the concentric structure gradually to align perpendicularly to the laser beam's electric field. The period of the surface wave structure was nearly equal to the wavelength of the irradiating laser pulse. In this accord, we propose that this structure is a precursor of ripple formation.",

author = "Takuro Tomita and Yasuhiro Fukumori and Keita Kinoshita and Shigeki Matsuo and Shuichi Hashimoto",

note = "Funding Information: We thank M. Yamaguchi of the Technical Research Institute Japan Society for The Promotion of Machine Industry for his fruitful discussion. We are grateful to the financial support provided by the Japanese Ministry of Education, Culture, Sports, Science and Technology through a Grant-in-Aid for Young Scientists (B) (No. 17760056), and a project research grant from the Faculty of Engineering, The University of Tokushima. Copyright: Copyright 2008 Elsevier B.V., All rights reserved.",

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AU - Tomita, Takuro

AU - Fukumori, Yasuhiro

AU - Kinoshita, Keita

AU - Matsuo, Shigeki

AU - Hashimoto, Shuichi

N1 - Funding Information: We thank M. Yamaguchi of the Technical Research Institute Japan Society for The Promotion of Machine Industry for his fruitful discussion. We are grateful to the financial support provided by the Japanese Ministry of Education, Culture, Sports, Science and Technology through a Grant-in-Aid for Young Scientists (B) (No. 17760056), and a project research grant from the Faculty of Engineering, The University of Tokushima. Copyright: Copyright 2008 Elsevier B.V., All rights reserved.

PY - 2008

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N2 - We found that irradiation by a single femtosecond laser pulse produced a surface wave structure on a (100) silicon surface. The surface wave structure bearing a concentric shape was produced only in the edge regions in the direction of the electric field from the center. The increase in the number of irradiating pulses allowed the concentric structure gradually to align perpendicularly to the laser beam's electric field. The period of the surface wave structure was nearly equal to the wavelength of the irradiating laser pulse. In this accord, we propose that this structure is a precursor of ripple formation.

AB - We found that irradiation by a single femtosecond laser pulse produced a surface wave structure on a (100) silicon surface. The surface wave structure bearing a concentric shape was produced only in the edge regions in the direction of the electric field from the center. The increase in the number of irradiating pulses allowed the concentric structure gradually to align perpendicularly to the laser beam's electric field. The period of the surface wave structure was nearly equal to the wavelength of the irradiating laser pulse. In this accord, we propose that this structure is a precursor of ripple formation.

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Observation of laser-induced surface waves on flat silicon surface

Abstract

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