Observation of the creation and annihilation of local current paths in HfO2 thin films on pt by ultrahigh-vacuum conductive atomic force microscopy: Evidence of oxygen spill over during the forming process

Naotaka Sasaki, Koji Kita, Akira Toriumi, Kentaro Kyuno

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By direct observation using ultrahigh-vacuum conductive atomic force microscopy, we find the reversible creation and annihilation of individual local current paths in HfO2 thin films on Pt. Experimental evidence of oxygen ion diffusion due to an electric field is obtained.

Original languageEnglish
Article number060202
JournalJapanese Journal of Applied Physics
Issue number6
Publication statusPublished - 2009 Jun


ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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