Observation of the creation and annihilation of local current paths in HfO2 thin films on Pt by ultrahigh-vacuum conductive atomic force microscopy : Evidence of oxygen spill over during the forming process

N.Sasaki N.Sasaki, K.Kita K.Kita, A.Toriumi A.Toriumi, K.Kyuno K.Kyuno, Kentaro Kyuno

Research output: Contribution to journal › Article

8 Citations (Scopus)
Original languageEnglish
JournalJapanese Journal of Applied Physics
Volume48
Publication statusPublished - 2009 Jun 1

Cite this

Observation of the creation and annihilation of local current paths in HfO2 thin films on Pt by ultrahigh-vacuum conductive atomic force microscopy : Evidence of oxygen spill over during the forming process. / N.Sasaki, N.Sasaki; K.Kita, K.Kita; A.Toriumi, A.Toriumi; K.Kyuno, K.Kyuno; Kyuno, Kentaro.

In: Japanese Journal of Applied Physics, Vol. 48, 01.06.2009.

Research output: Contribution to journal › Article

N.Sasaki, NS, K.Kita, KK, A.Toriumi, AT, K.Kyuno, KK & Kyuno, K 2009, 'Observation of the creation and annihilation of local current paths in HfO2 thin films on Pt by ultrahigh-vacuum conductive atomic force microscopy : Evidence of oxygen spill over during the forming process', Japanese Journal of Applied Physics, vol. 48.
N.Sasaki NS, K.Kita KK, A.Toriumi AT, K.Kyuno KK, Kyuno K. Observation of the creation and annihilation of local current paths in HfO2 thin films on Pt by ultrahigh-vacuum conductive atomic force microscopy : Evidence of oxygen spill over during the forming process. Japanese Journal of Applied Physics. 2009 Jun 1;48.
N.Sasaki, N.Sasaki ; K.Kita, K.Kita ; A.Toriumi, A.Toriumi ; K.Kyuno, K.Kyuno ; Kyuno, Kentaro. / Observation of the creation and annihilation of local current paths in HfO2 thin films on Pt by ultrahigh-vacuum conductive atomic force microscopy : Evidence of oxygen spill over during the forming process. In: Japanese Journal of Applied Physics. 2009 ; Vol. 48.
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AU - A.Toriumi, A.Toriumi

AU - K.Kyuno, K.Kyuno

AU - Kyuno, Kentaro

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