Observation of the creation and annihilation of local current paths in HfO2 thin films on Pt by ultrahigh-vacuum conductive atomic force microscopy : Evidence of oxygen spill over during the forming process

N.Sasaki N.Sasaki, K.Kita K.Kita, A.Toriumi A.Toriumi, K.Kyuno K.Kyuno, Kentaro Kyuno

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)
Original languageEnglish
JournalJapanese Journal of Applied Physics
Publication statusPublished - 2009 Jun 1

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