Observation of the creation and annihilation of local current paths in HfO2 thin films on Pt by ultrahigh-vacuum conductive atomic force microscopy : Evidence of oxygen spill over during the forming process

N.Sasaki N.Sasaki; K.Kita K.Kita; A.Toriumi A.Toriumi; K.Kyuno K.Kyuno; Kentaro Kyuno

Observation of the creation and annihilation of local current paths in HfO2 thin films on Pt by ultrahigh-vacuum conductive atomic force microscopy : Evidence of oxygen spill over during the forming process

N.Sasaki N.Sasaki, K.Kita K.Kita, A.Toriumi A.Toriumi, K.Kyuno K.Kyuno, Kentaro Kyuno

Functional Control Systems

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Japanese Journal of Applied Physics
Volume	48
Publication status	Published - 2009 Jun 1

Cite this

Observation of the creation and annihilation of local current paths in HfO2 thin films on Pt by ultrahigh-vacuum conductive atomic force microscopy : Evidence of oxygen spill over during the forming process. / N.Sasaki, N.Sasaki; K.Kita, K.Kita; A.Toriumi, A.Toriumi; K.Kyuno, K.Kyuno; Kyuno, Kentaro.

In: Japanese Journal of Applied Physics, Vol. 48, 01.06.2009.

Research output: Contribution to journal › Article › peer-review

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title = "Observation of the creation and annihilation of local current paths in HfO2 thin films on Pt by ultrahigh-vacuum conductive atomic force microscopy : Evidence of oxygen spill over during the forming process",

author = "N.Sasaki N.Sasaki and K.Kita K.Kita and A.Toriumi A.Toriumi and K.Kyuno K.Kyuno and Kentaro Kyuno",

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month = jun,

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journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

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AU - N.Sasaki, N.Sasaki

AU - K.Kita, K.Kita

AU - A.Toriumi, A.Toriumi

AU - K.Kyuno, K.Kyuno

AU - Kyuno, Kentaro

PY - 2009/6/1

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VL - 48

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

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