Observation of the creation and annihilation of local current paths in HfO2 thin films on Pt by ultrahigh-vacuum conductive atomic force microscopy : Evidence of oxygen spill over during the forming process

N.Sasaki N.Sasaki, K.Kita K.Kita, A.Toriumi A.Toriumi, K.Kyuno K.Kyuno, Kentaro Kyuno

Research output: Contribution to journalArticle

8 Citations (Scopus)
Original languageEnglish
JournalJapanese Journal of Applied Physics
Volume48
Publication statusPublished - 2009 Jun 1

Cite this

@article{e1aa84dea6be4b4cbe53909a05a5322c,
title = "Observation of the creation and annihilation of local current paths in HfO2 thin films on Pt by ultrahigh-vacuum conductive atomic force microscopy : Evidence of oxygen spill over during the forming process",
author = "N.Sasaki N.Sasaki and K.Kita K.Kita and A.Toriumi A.Toriumi and K.Kyuno K.Kyuno and Kentaro Kyuno",
year = "2009",
month = "6",
day = "1",
language = "English",
volume = "48",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",

}

TY - JOUR

T1 - Observation of the creation and annihilation of local current paths in HfO2 thin films on Pt by ultrahigh-vacuum conductive atomic force microscopy : Evidence of oxygen spill over during the forming process

AU - N.Sasaki, N.Sasaki

AU - K.Kita, K.Kita

AU - A.Toriumi, A.Toriumi

AU - K.Kyuno, K.Kyuno

AU - Kyuno, Kentaro

PY - 2009/6/1

Y1 - 2009/6/1

M3 - Article

VL - 48

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

ER -