Observation of the creation and annihilation of local current paths in HfO2 thin films on Pt by ultrahigh-vacuum conductive atomic force microscopy : Evidence of oxygen spill over during the forming process

N.Sasaki N.Sasaki; K.Kita K.Kita; A.Toriumi A.Toriumi; K.Kyuno K.Kyuno; Kentaro Kyuno

Observation of the creation and annihilation of local current paths in HfO2 thin films on Pt by ultrahigh-vacuum conductive atomic force microscopy : Evidence of oxygen spill over during the forming process

N.Sasaki N.Sasaki, K.Kita K.Kita, A.Toriumi A.Toriumi, K.Kyuno K.Kyuno, Kentaro Kyuno

Functional Control Systems

Research output: Contribution to journal › Article

Original language	English
Journal	Japanese Journal of Applied Physics
Volume	48
Publication status	Published - 2009 Jun 1

Cite this

N.Sasaki, N. S., K.Kita, K. K., A.Toriumi, A. T., K.Kyuno, K. K., & Kyuno, K. (2009). Observation of the creation and annihilation of local current paths in HfO2 thin films on Pt by ultrahigh-vacuum conductive atomic force microscopy : Evidence of oxygen spill over during the forming process. Japanese Journal of Applied Physics, 48.

Observation of the creation and annihilation of local current paths in HfO2 thin films on Pt by ultrahigh-vacuum conductive atomic force microscopy : Evidence of oxygen spill over during the forming process. / N.Sasaki, N.Sasaki; K.Kita, K.Kita; A.Toriumi, A.Toriumi; K.Kyuno, K.Kyuno; Kyuno, Kentaro.

In: Japanese Journal of Applied Physics, Vol. 48, 01.06.2009.

Research output: Contribution to journal › Article

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title = "Observation of the creation and annihilation of local current paths in HfO2 thin films on Pt by ultrahigh-vacuum conductive atomic force microscopy : Evidence of oxygen spill over during the forming process",

author = "N.Sasaki N.Sasaki and K.Kita K.Kita and A.Toriumi A.Toriumi and K.Kyuno K.Kyuno and Kentaro Kyuno",

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AU - N.Sasaki, N.Sasaki

AU - K.Kita, K.Kita

AU - A.Toriumi, A.Toriumi

AU - K.Kyuno, K.Kyuno

AU - Kyuno, Kentaro

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JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

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