On-chip force sensing by magnetically driven microtool for measurement of stimulant property of p. Laevis

Tomohiro Kawahara, Masakuni Sugita, Masaya Hagiwara, Yoko Yamanishi, Fumihito Arai, Hiroyuki Kawano, Ikuko Shihira-Ishikawa, Atsushi Miyawaki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

In this paper, we newly propose an on-chip force sensing by using a magnetically driven microtool (MMT) equipped with a frame structure for measurement of stimulant property of Pleurosira laevis. The design and fabrication of the force sensing structure with a displacement magnification mechanism based on beam deformation is discussed. Through the basic experiments, the advantages of the proposed layer fabrication technique and the performance of the force sensor are confirmed. The basic characteristics of P. laevis are also confirmed by using the developed MMT.

Original languageEnglish
Title of host publicationProceedings - IEEE International Conference on Robotics and Automation
Pages273-278
Number of pages6
DOIs
Publication statusPublished - 2011
Externally publishedYes
Event2011 IEEE International Conference on Robotics and Automation, ICRA 2011 - Shanghai
Duration: 2011 May 92011 May 13

Other

Other2011 IEEE International Conference on Robotics and Automation, ICRA 2011
CityShanghai
Period11/5/911/5/13

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ASJC Scopus subject areas

  • Software
  • Artificial Intelligence
  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Cite this

Kawahara, T., Sugita, M., Hagiwara, M., Yamanishi, Y., Arai, F., Kawano, H., ... Miyawaki, A. (2011). On-chip force sensing by magnetically driven microtool for measurement of stimulant property of p. Laevis. In Proceedings - IEEE International Conference on Robotics and Automation (pp. 273-278). [5980174] https://doi.org/10.1109/ICRA.2011.5980174