On-chip high speed microrobot made of Ni-Si composite structure with three-dimensionally patterned surface

M. Hagiwara, T. Kawahara, T. Iijima, T. Masuda, Y. Yamanishi, F. Arai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents the high speed microrobot actuation driven by permanent magnet in a microfluidic chip. The comprehensive analysis of fluid force, the optimum design and its fabrication was conducted to reduce the fluid force on the magnetically driven microrobot by attaching riblet shape on the microrobot. The Ni and Si composite fabrication was employed to form the optimum riblet shape on the Ni based microrobot by anisotropic Si wet etching and deep reactive ion etching. The evaluation experiments show the microrobot can actuate up to 100 Hz, which is 10 times higher than the original microrobot. In addition, since the microrobot was covered by Si, which is bio-compatible, it can be applied to cell manipulation without harm.

Original languageEnglish
Title of host publication2011 Int. Symp. on Micro-NanoMechatronics and Human Science, Symp. on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "Hyper Bio Assembler for 3D Cellular System Innovation"
Pages108-112
Number of pages5
DOIs
Publication statusPublished - 2012 Jul 6
Event22nd Annual Symp. on Micro-Nano Mechatronics and Human Science, MHS 2011, Held Jointly with the Symp. on COE for Education and Research of Micro-Nano Mechatronics, Micro-Nano GCOE 2011, Symp. on Hyper Bio Assembler for 3D Cellular System Innovation - Nagoya, Japan
Duration: 2011 Nov 62011 Nov 9

Publication series

Name2011 Int. Symp. on Micro-NanoMechatronics and Human Science, Symp. on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "Hyper Bio Assembler for 3D Cellular System Innovation"

Conference

Conference22nd Annual Symp. on Micro-Nano Mechatronics and Human Science, MHS 2011, Held Jointly with the Symp. on COE for Education and Research of Micro-Nano Mechatronics, Micro-Nano GCOE 2011, Symp. on Hyper Bio Assembler for 3D Cellular System Innovation
CountryJapan
CityNagoya
Period11/11/611/11/9

ASJC Scopus subject areas

  • Artificial Intelligence
  • Mechanical Engineering

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  • Cite this

    Hagiwara, M., Kawahara, T., Iijima, T., Masuda, T., Yamanishi, Y., & Arai, F. (2012). On-chip high speed microrobot made of Ni-Si composite structure with three-dimensionally patterned surface. In 2011 Int. Symp. on Micro-NanoMechatronics and Human Science, Symp. on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "Hyper Bio Assembler for 3D Cellular System Innovation" (pp. 108-112). [6102169] (2011 Int. Symp. on Micro-NanoMechatronics and Human Science, Symp. on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "Hyper Bio Assembler for 3D Cellular System Innovation"). https://doi.org/10.1109/MHS.2011.6102169