On-chip micro-droplet dispenser with disposable structure

Takehito Mizunuma, Yoko Yamanishi, Shinya Sakuma, Hisataka Maruyama, Fumihito Arai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

We succeeded in dispensing micro-droplet by a disposable on-chip inkjet mechanism. Novelty of this paper is summarized as follows. (1) We employed a glass bonded PDMS to obtain leaf spring structure whose spring coefficient is 14 times of the conventional PDMS chip. As a result, we succeeded in dispensing of droplets by vibrating the membrane using the piezoelectric actuator attached to the PDMS disposable chip. (2) The nozzle for droplet dispensing was fabricated by SU-8 to obtain the hydrophobic surface which prevents any undesired satellite droplets produced. Consequently the accuracy of position of the droplet dispensing was achieved ±5 μm. The size of the droplet produced from the disposable nozzle (diameter = 100 μm) was in the range of 95-105 μm at the applied voltage of 105 V.

Original languageEnglish
Title of host publicationProceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences
PublisherChemical and Biological Microsystems Society
Pages1778-1780
Number of pages3
ISBN (Print)9780979806421
Publication statusPublished - 2009
Externally publishedYes
Event13th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2009 - Jeju
Duration: 2009 Nov 12009 Nov 5

Other

Other13th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2009
CityJeju
Period09/11/109/11/5

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Keywords

  • Droplet dispenser
  • Inkjet
  • Microfluidic chip
  • Photolithography

ASJC Scopus subject areas

  • Chemical Engineering (miscellaneous)
  • Bioengineering

Cite this

Mizunuma, T., Yamanishi, Y., Sakuma, S., Maruyama, H., & Arai, F. (2009). On-chip micro-droplet dispenser with disposable structure. In Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences (pp. 1778-1780). Chemical and Biological Microsystems Society.