On-chip particle-laden droplet dispensing by disposable inkjet system

Takehito Mizunuma, Yoko Yamanishi, Shinya Sakuma, Hisataka Maruyama, Fumihito Arai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

We succeeded in dispensing micro-droplet by a disposable on-chip inkjet mechanism. Novelty of this paper is summarized as follows. (1) We employed a glass plate bonded Poly-dimethylsiloxane (PDMS) membrane to obtain leaf spring structure whose spring coefficient is 14 times of the conventional PDMS membrane. As a result, we succeeded in dispensing droplets continuously (up to 10 Hz) by vibrating the membrane using the multilayers piezoelectric actuator attached to the PDMS disposable chip. (2) The nozzle for droplet dispensing was fabricated by thick photoresist (SU-8) to obtain the hydrophobic surface which prevents any undesired satellite droplets produced. Consequently the accuracy of position of the droplet dispensing was achieved ± 5 μm. The size of the droplet produced from the disposable nozzle (diameter = 100 μm) was in the range of 95-105 μm at the applied voltage of 105 V.

Original languageEnglish
Title of host publication20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science
Pages344-349
Number of pages6
DOIs
Publication statusPublished - 2009
Externally publishedYes
Event20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science - Nagoya
Duration: 2009 Nov 82009 Nov 11

Other

Other20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science
CityNagoya
Period09/11/809/11/11

Fingerprint

Polydimethylsiloxane
Membranes
Nozzles
Leaf springs
Piezoelectric actuators
Photoresists
Multilayers
Satellites
Glass
Electric potential

ASJC Scopus subject areas

  • Computer Science(all)
  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Cite this

Mizunuma, T., Yamanishi, Y., Sakuma, S., Maruyama, H., & Arai, F. (2009). On-chip particle-laden droplet dispensing by disposable inkjet system. In 20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science (pp. 344-349). [5351878] https://doi.org/10.1109/MHS.2009.5351878

On-chip particle-laden droplet dispensing by disposable inkjet system. / Mizunuma, Takehito; Yamanishi, Yoko; Sakuma, Shinya; Maruyama, Hisataka; Arai, Fumihito.

20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science. 2009. p. 344-349 5351878.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Mizunuma, T, Yamanishi, Y, Sakuma, S, Maruyama, H & Arai, F 2009, On-chip particle-laden droplet dispensing by disposable inkjet system. in 20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science., 5351878, pp. 344-349, 20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science, Nagoya, 09/11/8. https://doi.org/10.1109/MHS.2009.5351878
Mizunuma T, Yamanishi Y, Sakuma S, Maruyama H, Arai F. On-chip particle-laden droplet dispensing by disposable inkjet system. In 20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science. 2009. p. 344-349. 5351878 https://doi.org/10.1109/MHS.2009.5351878
Mizunuma, Takehito ; Yamanishi, Yoko ; Sakuma, Shinya ; Maruyama, Hisataka ; Arai, Fumihito. / On-chip particle-laden droplet dispensing by disposable inkjet system. 20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science. 2009. pp. 344-349
@inproceedings{578274c15d7b477d90cd4b468c890544,
title = "On-chip particle-laden droplet dispensing by disposable inkjet system",
abstract = "We succeeded in dispensing micro-droplet by a disposable on-chip inkjet mechanism. Novelty of this paper is summarized as follows. (1) We employed a glass plate bonded Poly-dimethylsiloxane (PDMS) membrane to obtain leaf spring structure whose spring coefficient is 14 times of the conventional PDMS membrane. As a result, we succeeded in dispensing droplets continuously (up to 10 Hz) by vibrating the membrane using the multilayers piezoelectric actuator attached to the PDMS disposable chip. (2) The nozzle for droplet dispensing was fabricated by thick photoresist (SU-8) to obtain the hydrophobic surface which prevents any undesired satellite droplets produced. Consequently the accuracy of position of the droplet dispensing was achieved ± 5 μm. The size of the droplet produced from the disposable nozzle (diameter = 100 μm) was in the range of 95-105 μm at the applied voltage of 105 V.",
author = "Takehito Mizunuma and Yoko Yamanishi and Shinya Sakuma and Hisataka Maruyama and Fumihito Arai",
year = "2009",
doi = "10.1109/MHS.2009.5351878",
language = "English",
isbn = "9781424450954",
pages = "344--349",
booktitle = "20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science",

}

TY - GEN

T1 - On-chip particle-laden droplet dispensing by disposable inkjet system

AU - Mizunuma, Takehito

AU - Yamanishi, Yoko

AU - Sakuma, Shinya

AU - Maruyama, Hisataka

AU - Arai, Fumihito

PY - 2009

Y1 - 2009

N2 - We succeeded in dispensing micro-droplet by a disposable on-chip inkjet mechanism. Novelty of this paper is summarized as follows. (1) We employed a glass plate bonded Poly-dimethylsiloxane (PDMS) membrane to obtain leaf spring structure whose spring coefficient is 14 times of the conventional PDMS membrane. As a result, we succeeded in dispensing droplets continuously (up to 10 Hz) by vibrating the membrane using the multilayers piezoelectric actuator attached to the PDMS disposable chip. (2) The nozzle for droplet dispensing was fabricated by thick photoresist (SU-8) to obtain the hydrophobic surface which prevents any undesired satellite droplets produced. Consequently the accuracy of position of the droplet dispensing was achieved ± 5 μm. The size of the droplet produced from the disposable nozzle (diameter = 100 μm) was in the range of 95-105 μm at the applied voltage of 105 V.

AB - We succeeded in dispensing micro-droplet by a disposable on-chip inkjet mechanism. Novelty of this paper is summarized as follows. (1) We employed a glass plate bonded Poly-dimethylsiloxane (PDMS) membrane to obtain leaf spring structure whose spring coefficient is 14 times of the conventional PDMS membrane. As a result, we succeeded in dispensing droplets continuously (up to 10 Hz) by vibrating the membrane using the multilayers piezoelectric actuator attached to the PDMS disposable chip. (2) The nozzle for droplet dispensing was fabricated by thick photoresist (SU-8) to obtain the hydrophobic surface which prevents any undesired satellite droplets produced. Consequently the accuracy of position of the droplet dispensing was achieved ± 5 μm. The size of the droplet produced from the disposable nozzle (diameter = 100 μm) was in the range of 95-105 μm at the applied voltage of 105 V.

UR - http://www.scopus.com/inward/record.url?scp=77950936649&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77950936649&partnerID=8YFLogxK

U2 - 10.1109/MHS.2009.5351878

DO - 10.1109/MHS.2009.5351878

M3 - Conference contribution

AN - SCOPUS:77950936649

SN - 9781424450954

SP - 344

EP - 349

BT - 20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science

ER -