On-chip particle-laden droplet dispensing by disposable inkjet system

Takehito Mizunuma, Yoko Yamanishi, Shinya Sakuma, Hisataka Maruyama, Fumihito Arai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

We succeeded in dispensing micro-droplet by a disposable on-chip inkjet mechanism. Novelty of this paper is summarized as follows. (1) We employed a glass plate bonded Poly-dimethylsiloxane (PDMS) membrane to obtain leaf spring structure whose spring coefficient is 14 times of the conventional PDMS membrane. As a result, we succeeded in dispensing droplets continuously (up to 10 Hz) by vibrating the membrane using the multilayers piezoelectric actuator attached to the PDMS disposable chip. (2) The nozzle for droplet dispensing was fabricated by thick photoresist (SU-8) to obtain the hydrophobic surface which prevents any undesired satellite droplets produced. Consequently the accuracy of position of the droplet dispensing was achieved ± 5 μm. The size of the droplet produced from the disposable nozzle (diameter = 100 μm) was in the range of 95-105 μm at the applied voltage of 105 V.

Original languageEnglish
Title of host publication20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science
Pages344-349
Number of pages6
DOIs
Publication statusPublished - 2009
Event20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science - Nagoya, Japan
Duration: 2009 Nov 82009 Nov 11

Publication series

Name20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science

Conference

Conference20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science
CountryJapan
CityNagoya
Period09/11/809/11/11

ASJC Scopus subject areas

  • Computer Science(all)
  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Mizunuma, T., Yamanishi, Y., Sakuma, S., Maruyama, H., & Arai, F. (2009). On-chip particle-laden droplet dispensing by disposable inkjet system. In 20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science (pp. 344-349). [5351878] (20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science). https://doi.org/10.1109/MHS.2009.5351878