On proximity effect in electron beam induced deposition

K. Mitsuishi, Masayuki Shimojo, M. Takeguchi, M. Tanaka, K. Furuya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference
Pages154-155
Number of pages2
Volume2005
Publication statusPublished - 2005
Externally publishedYes
Event2005 International Microprocesses and Nanotechnology Conference - Tokyo
Duration: 2005 Oct 252005 Oct 28

Other

Other2005 International Microprocesses and Nanotechnology Conference
CityTokyo
Period05/10/2505/10/28

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Electron beams

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Mitsuishi, K., Shimojo, M., Takeguchi, M., Tanaka, M., & Furuya, K. (2005). On proximity effect in electron beam induced deposition. In Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference (Vol. 2005, pp. 154-155). [1595260]

On proximity effect in electron beam induced deposition. / Mitsuishi, K.; Shimojo, Masayuki; Takeguchi, M.; Tanaka, M.; Furuya, K.

Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference. Vol. 2005 2005. p. 154-155 1595260.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Mitsuishi, K, Shimojo, M, Takeguchi, M, Tanaka, M & Furuya, K 2005, On proximity effect in electron beam induced deposition. in Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference. vol. 2005, 1595260, pp. 154-155, 2005 International Microprocesses and Nanotechnology Conference, Tokyo, 05/10/25.
Mitsuishi K, Shimojo M, Takeguchi M, Tanaka M, Furuya K. On proximity effect in electron beam induced deposition. In Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference. Vol. 2005. 2005. p. 154-155. 1595260
Mitsuishi, K. ; Shimojo, Masayuki ; Takeguchi, M. ; Tanaka, M. ; Furuya, K. / On proximity effect in electron beam induced deposition. Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference. Vol. 2005 2005. pp. 154-155
@inproceedings{ef03666a92cd4878b187026ef39fbfd0,
title = "On proximity effect in electron beam induced deposition",
author = "K. Mitsuishi and Masayuki Shimojo and M. Takeguchi and M. Tanaka and K. Furuya",
year = "2005",
language = "English",
isbn = "4990247221",
volume = "2005",
pages = "154--155",
booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference",

}

TY - GEN

T1 - On proximity effect in electron beam induced deposition

AU - Mitsuishi, K.

AU - Shimojo, Masayuki

AU - Takeguchi, M.

AU - Tanaka, M.

AU - Furuya, K.

PY - 2005

Y1 - 2005

UR - http://www.scopus.com/inward/record.url?scp=33847184619&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33847184619&partnerID=8YFLogxK

M3 - Conference contribution

SN - 4990247221

SN - 9784990247225

VL - 2005

SP - 154

EP - 155

BT - Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference

ER -