| Original language | English |
|---|---|
| Title of host publication | Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference |
| Pages | 154-155 |
| Number of pages | 2 |
| Volume | 2005 |
| Publication status | Published - 2005 |
| Externally published | Yes |
| Event | 2005 International Microprocesses and Nanotechnology Conference - Tokyo Duration: 2005 Oct 25 → 2005 Oct 28 |
Other
| Other | 2005 International Microprocesses and Nanotechnology Conference |
|---|---|
| City | Tokyo |
| Period | 05/10/25 → 05/10/28 |
ASJC Scopus subject areas
- Engineering(all)
Cite this
Mitsuishi, K., Shimojo, M., Takeguchi, M., Tanaka, M., & Furuya, K. (2005). On proximity effect in electron beam induced deposition. In Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference (Vol. 2005, pp. 154-155). [1595260]