On proximity effect in electron beam induced deposition

K. Mitsuishi, Masayuki Shimojo, M. Takeguchi, M. Tanaka, K. Furuya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference
Pages154-155
Number of pages2
Volume2005
Publication statusPublished - 2005
Externally publishedYes
Event2005 International Microprocesses and Nanotechnology Conference - Tokyo
Duration: 2005 Oct 252005 Oct 28

Other

Other2005 International Microprocesses and Nanotechnology Conference
CityTokyo
Period05/10/2505/10/28

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Mitsuishi, K., Shimojo, M., Takeguchi, M., Tanaka, M., & Furuya, K. (2005). On proximity effect in electron beam induced deposition. In Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference (Vol. 2005, pp. 154-155). [1595260]