On proximity effect in electron beam induced deposition

K. Mitsuishi, M. Shimojo, M. Takeguchi, M. Tanaka, K. Furuya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2005
Subtitle of host publication2005 International Microprocesses and Nanotechnology Conference
Pages154-155
Number of pages2
Publication statusPublished - 2005 Dec 1
Event2005 International Microprocesses and Nanotechnology Conference - Tokyo, Japan
Duration: 2005 Oct 252005 Oct 28

Publication series

NameDigest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference
Volume2005

Conference

Conference2005 International Microprocesses and Nanotechnology Conference
CountryJapan
CityTokyo
Period05/10/2505/10/28

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Mitsuishi, K., Shimojo, M., Takeguchi, M., Tanaka, M., & Furuya, K. (2005). On proximity effect in electron beam induced deposition. In Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference (pp. 154-155). [1595260] (Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference; Vol. 2005).