| Original language | English |
|---|---|
| Title of host publication | Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference |
| Pages | 154-155 |
| Number of pages | 2 |
| Volume | 2005 |
| Publication status | Published - 2005 |
| Externally published | Yes |
| Event | 2005 International Microprocesses and Nanotechnology Conference - Tokyo Duration: 2005 Oct 25 → 2005 Oct 28 |
Other
| Other | 2005 International Microprocesses and Nanotechnology Conference |
|---|---|
| City | Tokyo |
| Period | 05/10/25 → 05/10/28 |
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ASJC Scopus subject areas
- Engineering(all)
Cite this
On proximity effect in electron beam induced deposition. / Mitsuishi, K.; Shimojo, Masayuki; Takeguchi, M.; Tanaka, M.; Furuya, K.
Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference. Vol. 2005 2005. p. 154-155 1595260.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - On proximity effect in electron beam induced deposition
AU - Mitsuishi, K.
AU - Shimojo, Masayuki
AU - Takeguchi, M.
AU - Tanaka, M.
AU - Furuya, K.
PY - 2005
Y1 - 2005
UR - http://www.scopus.com/inward/record.url?scp=33847184619&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33847184619&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:33847184619
SN - 4990247221
SN - 9784990247225
VL - 2005
SP - 154
EP - 155
BT - Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference
ER -