On proximity effect in electron beam induced deposition

K. Mitsuishi; M. Shimojo; M. Takeguchi; M. Tanaka; K. Furuya

On proximity effect in electron beam induced deposition

K. Mitsuishi, M. Shimojo, M. Takeguchi, M. Tanaka, K. Furuya

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Digest of Papers - Microprocesses and Nanotechnology 2005
Subtitle of host publication	2005 International Microprocesses and Nanotechnology Conference
Pages	154-155
Number of pages	2
Publication status	Published - 2005 Dec 1
Externally published	Yes
Event	2005 International Microprocesses and Nanotechnology Conference - Tokyo, Japan Duration: 2005 Oct 25 → 2005 Oct 28

Publication series

Name	Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference
Volume	2005

Conference

Conference	2005 International Microprocesses and Nanotechnology Conference
Country/Territory	Japan
City	Tokyo
Period	05/10/25 → 05/10/28

ASJC Scopus subject areas

Engineering(all)

Cite this

Mitsuishi, K., Shimojo, M., Takeguchi, M., Tanaka, M., & Furuya, K. (2005). On proximity effect in electron beam induced deposition. In Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference (pp. 154-155). [1595260] (Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference; Vol. 2005).

On proximity effect in electron beam induced deposition. / Mitsuishi, K.; Shimojo, M.; Takeguchi, M.; Tanaka, M.; Furuya, K.

Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference. 2005. p. 154-155 1595260 (Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference; Vol. 2005).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Mitsuishi, K, Shimojo, M, Takeguchi, M, Tanaka, M & Furuya, K 2005, On proximity effect in electron beam induced deposition. in Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference., 1595260, Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference, vol. 2005, pp. 154-155, 2005 International Microprocesses and Nanotechnology Conference, Tokyo, Japan, 05/10/25.

Mitsuishi K, Shimojo M, Takeguchi M, Tanaka M, Furuya K. On proximity effect in electron beam induced deposition. In Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference. 2005. p. 154-155. 1595260. (Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference).

Mitsuishi, K. ; Shimojo, M. ; Takeguchi, M. ; Tanaka, M. ; Furuya, K. / On proximity effect in electron beam induced deposition. Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference. 2005. pp. 154-155 (Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference).

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title = "On proximity effect in electron beam induced deposition",

author = "K. Mitsuishi and M. Shimojo and M. Takeguchi and M. Tanaka and K. Furuya",

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AU - Mitsuishi, K.

AU - Shimojo, M.

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AU - Tanaka, M.

AU - Furuya, K.

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M3 - Conference contribution

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BT - Digest of Papers - Microprocesses and Nanotechnology 2005

T2 - 2005 International Microprocesses and Nanotechnology Conference

Y2 - 25 October 2005 through 28 October 2005

ER -

On proximity effect in electron beam induced deposition

Publication series

Conference

ASJC Scopus subject areas

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Cite this