Optical nonreciprocal devices with a silicon guiding layer fabricated by wafer bonding

Hideki Yokoi, Tetsuya Mizumoto, Yuya Shoji

Research output: Contribution to journalArticle

64 Citations (Scopus)

Abstract

Optical nonreciprocal devices with a silicon guiding layer fabricated by wafer bonding are proposed. The optical nonreciprocal devices are composed of a magneto-optic waveguide with a magnetic garnet/Si/SiO2 structure. Nonreciprocal characteristics are obtained by an evanescent field penetrating into the upper magnetic garnet cladding layer. Several kinds of the optical nonreciprocal device are investigated with the magneto-optic waveguide and designed at a wavelength of 1.55 μm. As a preliminary experiment, wafer bonding between Gd3Ga5O12 and Si was studied. Wafer bonding was successfully achieved with eat treatment at 220°C in H2 ambient.

Original languageEnglish
Pages (from-to)6605-6612
Number of pages8
JournalApplied Optics
Volume42
Issue number33
Publication statusPublished - 2003 Nov 20
Externally publishedYes

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Wafer bonding
Optical devices
Magnetooptical effects
Garnets
magneto-optics
wafers
Silicon
garnets
Waveguides
silicon
waveguides
Evanescent fields
Wavelength
wavelengths
Experiments

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Optical nonreciprocal devices with a silicon guiding layer fabricated by wafer bonding. / Yokoi, Hideki; Mizumoto, Tetsuya; Shoji, Yuya.

In: Applied Optics, Vol. 42, No. 33, 20.11.2003, p. 6605-6612.

Research output: Contribution to journalArticle

Yokoi, Hideki ; Mizumoto, Tetsuya ; Shoji, Yuya. / Optical nonreciprocal devices with a silicon guiding layer fabricated by wafer bonding. In: Applied Optics. 2003 ; Vol. 42, No. 33. pp. 6605-6612.
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