Optical nonreciprocal devices with a silicon guiding layer fabricated by wafer bonding

Hideki Yokoi, Tetsuya Mizumoto, Yuya Shoji

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Abstract

Optical nonreciprocal devices with a silicon guiding layer fabricated by wafer bonding are proposed. The optical nonreciprocal devices are composed of a magneto-optic waveguide with a magnetic garnet/Si/SiO2structure. Nonreciprocal characteristics are obtained by an evanescent field penetrating into the upper magnetic garnet cladding layer. Several kinds of the optical nonreciprocal device are investigated with the magneto-optic waveguide and designed at a wavelength of 1.55 μm. As a preliminary experiment, wafer bonding between Gd3Ga5O12and Si was studied. Wafer bonding was successfully achieved with heat treatment at 220 °C in H2ambient.

Original languageEnglish
Pages (from-to)6605-6612
Number of pages8
JournalApplied Optics
Volume42
Issue number33
DOIs
Publication statusPublished - 2003 Nov 20

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ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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