Rib waveguides, which are made of magnetic garnet films of composition (GdBi)3Fe5O12 and are fabricated by Ar sputter etching, have large optical propagation loss when Ti is used as the etch mask. The loss increase is alleviated by using a SiO2 mask. X-ray photoelectron spectroscopy analysis reveals that Fe chemical shift due to Ar+ ion bombardment causes increase in the optical absorption loss, and hence the propagation loss.
|Title of host publication||Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers|
|Place of Publication||Minato-ku, Japan|
|Number of pages||2|
|Publication status||Published - 1995 Sep|
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