Optical propagation loss increase of (Gdbi)3fe5o12 films caused by sputter etching

Hideki Yokoi, Tetsuya Mizumoto, Yoshiyuki Naito

Research output: Contribution to journalComment/debatepeer-review

1 Citation (Scopus)

Abstract

Rib waveguides, which are made of magnetic garnet films of composition (GdBi)3Fe5O12 and are fabricated by Ar sputter etching, have large optical propagation loss when Ti is used as the etch mask. The loss increase is alleviated by using a SiO2 mask. X-ray photoelectron spectroscopy analysis reveals that Fe chemical shift due to Ar+ ion bombardment causes increase in the optical absorption loss, and hence the propagation loss.

Original languageEnglish
Pages (from-to)4817-4818
Number of pages2
JournalJapanese Journal of Applied Physics
Volume34
Issue number9R
DOIs
Publication statusPublished - 1995 Sep
Externally publishedYes

Keywords

  • (GdBi)FeO
  • Optical absorption loss
  • Rib waveguide
  • Sputter etching
  • X-ray photoelectron spectroscopy

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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