Optical Properties of Fluorinated Silicon Oxide and Organic Spin-on-Glass Films fou Thin-Film Optical Waveguides.

T.Homma T.Homma, M.Sakamoto M.Sakamoto, Y.Ariyama Y.Ariyama, S.Kanegae S.Kanegae, H.Kondo H.Kondo, M.Itoh M.Itoh, M.Yamaguchi M.Yamaguchi, H.Takahashi H.Takahashi, Tetsuya Homma

Research output: Contribution to journalArticle

13 Citations (Scopus)
Original languageEnglish
Pages (from-to)1141-1144
JournalJournal of The Eectrochemical Society
Volume147
Publication statusPublished - 2000 Mar 1

Cite this

T.Homma, T. H., M.Sakamoto, M. S., Y.Ariyama, Y. A., S.Kanegae, S. K., H.Kondo, H. K., M.Itoh, M. I., M.Yamaguchi, M. Y., H.Takahashi, H. T., & Homma, T. (2000). Optical Properties of Fluorinated Silicon Oxide and Organic Spin-on-Glass Films fou Thin-Film Optical Waveguides. Journal of The Eectrochemical Society, 147, 1141-1144.