Optical Properties of Fluorinated Silicon Oxide and Organic Spin-on-Glass Films fou Thin-Film Optical Waveguides.

T.Homma T.Homma; M.Sakamoto M.Sakamoto; Y.Ariyama Y.Ariyama; S.Kanegae S.Kanegae; H.Kondo H.Kondo; M.Itoh M.Itoh; M.Yamaguchi M.Yamaguchi; H.Takahashi H.Takahashi; Tetsuya Homma

Optical Properties of Fluorinated Silicon Oxide and Organic Spin-on-Glass Films fou Thin-Film Optical Waveguides.

T.Homma T.Homma, M.Sakamoto M.Sakamoto, Y.Ariyama Y.Ariyama, S.Kanegae S.Kanegae, H.Kondo H.Kondo, M.Itoh M.Itoh, M.Yamaguchi M.Yamaguchi, H.Takahashi H.Takahashi, Tetsuya Homma

Functional Control Systems

Research output: Contribution to journal › Article › peer-review

13 Citations (Scopus)

Original language	English
Pages (from-to)	1141-1144
Journal	Journal of The Eectrochemical Society
Volume	147
Publication status	Published - 2000 Mar 1

Cite this

@article{81d3a1c373634464ade031311382d0cd,

title = "Optical Properties of Fluorinated Silicon Oxide and Organic Spin-on-Glass Films fou Thin-Film Optical Waveguides.",

author = "T.Homma T.Homma and M.Sakamoto M.Sakamoto and Y.Ariyama Y.Ariyama and S.Kanegae S.Kanegae and H.Kondo H.Kondo and M.Itoh M.Itoh and M.Yamaguchi M.Yamaguchi and H.Takahashi H.Takahashi and Tetsuya Homma",

year = "2000",

month = mar,

day = "1",

language = "English",

volume = "147",

pages = "1141--1144",

journal = "Journal of The Eectrochemical Society",

}

TY - JOUR

T1 - Optical Properties of Fluorinated Silicon Oxide and Organic Spin-on-Glass Films fou Thin-Film Optical Waveguides.

AU - T.Homma, T.Homma

AU - M.Sakamoto, M.Sakamoto

AU - Y.Ariyama, Y.Ariyama

AU - S.Kanegae, S.Kanegae

AU - H.Kondo, H.Kondo

AU - M.Itoh, M.Itoh

AU - M.Yamaguchi, M.Yamaguchi

AU - H.Takahashi, H.Takahashi

AU - Homma, Tetsuya

PY - 2000/3/1

Y1 - 2000/3/1

M3 - Article

VL - 147

SP - 1141

EP - 1144

JO - Journal of The Eectrochemical Society

JF - Journal of The Eectrochemical Society

ER -